Trace corrosive gas environmental test box

Abstract

The invention discloses a trace corrosive gas environmental test box and belongs to the technical field of environment friendliness and material corrosion research. The trace corrosive gas environmental test box comprises a clean air supply module, a trace corrosive gas generation module, a sample corrosion test reaction module, an air recovery module and an in-situ image acquisition system. A multi-gas-path trace corrosive gas environmental test box which can perform in-situ observation on the surface state of a sample and control temperature to be 25 to 80 DEG C, humidity to be 40 to 97 percent and the concentration of the trace corrosive gas to be 10 to 10,000ppb is implemented. The trace corrosive gas environmental test box has the advantages of occupying small floor, along with simple structure, convenience in operation, light pollution, high accuracy, capacity of controlling temperature, humidity and the concentration of polluted air simultaneously and acquiring images of a sample state in real time, and can be applied to scientific research and engineering experimental research.

Description

technical field [0001] The invention belongs to the technical field of environmental protection and material corrosion research, and in particular provides a micro-corrosion gas environment test chamber capable of in-situ observation of the surface state of a sample with temperature control, humidity control, and gas concentration control. technical background [0002] With the advancement of science and technology, the integration and miniaturization of electronic components have been further improved, and a very small amount of adsorbed liquid film or corrosion products will have a serious impact on the performance of electronic components. The nature of environmental damage to electronic components is that once a thin liquid film is formed on the metal surface, corrosion electrochemical reactions begin to occur, especially when there is SO 2 、H 2 S. NO x When the gas is polluted, the electronic components will corrode rapidly, resulting in the loss of device functions a...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a trace corrosive gas environment test chamber, which solves the problems of high cost, large footprint, low device precision, single gas source, uncontrollable temperature and humidity, and in-situ observation in the process of using the previous equipment. Realize a high-precision ppb level (10-10000ppb) trace corrosive gas environmental test chamber with simple structure, light weight and convenience, multiple gas sources, temperature control and humidity control, and in-situ observation

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