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Circuit pattern inspection device

A technology for inspecting devices and circuit patterns, used in measurement devices, electronic circuit testing, non-contact circuit testing, etc.

Active Publication Date: 2015-04-29
OHT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the area of ​​the power supply electrode is increased, it may not be properly detected even if a defect such as an open circuit occurs in the portion of the conductor pattern facing the power supply electrode.

Method used

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  • Circuit pattern inspection device
  • Circuit pattern inspection device
  • Circuit pattern inspection device

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Embodiment Construction

[0012] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0013] The circuit pattern inspection device of the present invention detects open circuit and short circuit defects that are the cause of failure in a plurality of rows of conductive patterns (wiring patterns) formed on, for example, a glass substrate in a manufacturing process. The conductive pattern to be inspected is used for circuit wiring in, for example, liquid crystal display panels and touch panels, and is electrically separated into multiple columns in a parallel arrangement, or one end of all conductive patterns is connected by a shorting bar. Comb tooth-shaped conductive pattern. In addition, the conductive patterns formed on the substrate can be inspected even if they are not arranged in parallel and at equal intervals as long as the positions of the patterns can be identified.

[0014] In addition, when the inspection unit described later moves,...

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Abstract

The invention provides a circuit pattern inspection device, which comprises a supplementary electrode for the defect detection of a conductive pattern portion opposed to the electrodes of a pair of electrodes to be detected.

Description

technical field [0001] The present invention relates to a circuit pattern inspection device capable of inspecting defects of conductive patterns formed on a substrate in a non-contact manner. Background technique [0002] In recent years, as a display device, a liquid crystal display device using liquid crystal on a glass substrate or a plasma display device using plasma has become mainstream. In the manufacturing process of these display devices, the defect inspection of the presence or absence of an open circuit and a short circuit is performed on the conductive pattern which becomes a circuit wiring formed on the glass substrate. [0003] As an inspection method of a conductive pattern, in Japanese Patent Laid-Open No. 2004-191381, for example, at least two inspection probes are brought close to a conductive pattern, and while moving in a state capacitively coupled with the conductive pattern in a non-contact manner, one inspection probe is inspected. The probe applies a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/28
CPCG01R31/2825G01R31/2867G01R31/2879G01R31/2884G01R31/303
Inventor 羽森宽
Owner OHT