Method and device for measuring pixel pitch of image sensor on basis of line light source

Abstract

A method and a device for measuring pixel pitch of an image sensor on the basis of a line light source belong to the field of length, or width or thickness metering of the metering equipment field which is characterized by utilizing an optical method. The method for measuring the pixel pitch of the image sensor on the basis of the line light source includes that a linear image is obtained by targeting the line light source, the pixel pitch of the image sensor is acquired by calculating by using the equality of a practically- measured frequency when the modulation transfer function value reaches the minimum value for the first time with a theoretical cutoff frequency in a frequency domain. The device for measuring the pixel pitch of the image sensor on the basis of the line light source is located in the plane determined by an optical axis direction and a row direction or a line direction of the image sensor, the line light source is curved, any part of the line light source can be subjected to quasi focal imaging to the surface of the image sensor. By adopting the method and the device for measuring the pixel pitch of the image sensor on the basis of line light source, errors among results of a single measurement can be reduced so that repeatability of the measurement results can be improved.

Description

technical field [0001] The method and device for measuring the pixel pitch of an image sensor based on a line light source belong to the field of measuring length, width or thickness in the field of measuring equipment characterized by the use of optical methods, and in particular relate to a line light source as the target, using line in the frequency domain A measurement method and device for measuring the pixel pitch of an image sensor by using a light source image. Background technique [0002] Image sensor pixel pitch is a very important technical indicator in the field of precision measurement. For example, if a target with a known size is imaged through an optical system, the size of the target image can be known according to the number of pixels of the image sensor occupied by the target image and the pixel pitch, and finally the size of the target image can be compared with the target size to obtain The lateral magnification of the optical system can be calibrated;...

AI Technical Summary

Problems solved by technology

[0041] The present invention aims at the problem that the above-mentioned existing measurement method is not suitable for measurement in a small field of view, and the problem that the existing measurement device has defocus, and proposes a method and device for measuring the pixel pitch of an image sensor in the frequency domain. Improves the repeatability of measurement results within the field; the device can eliminate the influence of defocus on measurement results

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