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Micro-nano composite structure of solar battery photo anode and preparation method thereof

A micro-nano composite structure and solar cell technology, which is applied in the manufacture of circuits, electrical components, and final products, can solve problems such as environmental pollution, climate warming, and limited reserves of fossil energy on the earth, and achieve high collection efficiency and light trapping capabilities Strong, large surface area effect

Inactive Publication Date: 2014-12-10
HUAZHONG UNIV OF SCI & TECH
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

The earth reserves of traditional fossil energy are limited, and it will cause serious environmental pollution problems, especially due to the large amount of CO 2 emissions of gases that warm the global climate with very serious consequences

Method used

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  • Micro-nano composite structure of solar battery photo anode and preparation method thereof
  • Micro-nano composite structure of solar battery photo anode and preparation method thereof

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Embodiment Construction

[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0033] In the embodiment of the present invention, the process for manufacturing the micro-nano composite structure for the photoanode of the solar cell includes the following specific steps:

[0034] (1) Spread the glue on the cleaned silicon wafer and perform photolithography to prepare a micro-scale photoresist disk pattern distributed in an array, with a diameter of 10 microns, a distance between centers of 20 microns, and a right-angle distribution;

[0035] (2) Using the photoresist as a mask, use the ICP dry method to etch an array of silicon pillars with a diameter of 10 microns;

[0036] ...

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Abstract

The invention discloses a micro-nano composite structure of a solar battery photo anode and a preparation method thereof. The preparation method comprises the following steps of: S1: homogenizing glue on a silicon sheet, carrying out photoetching, and manufacturing a micro-scale photoresist disk image; S2: taking the photoresist as a mask and etching a micron-grade silicon column array by utilizing an ICP (Inductively Coupled Plasma) dry method; S3: washing the silicon sheet with a micron-grade silicon column by adopting an SPM (Scalable Production Monitoring) process to remove an oxidized layer on the surface of the micron-grade silicon column; S4: carrying out electrochemical plating to plate one layer of silver on the surface of the micron-grade silicon column; S5: carrying out metal catalytic etching by utilizing an etching agent, manufacturing a nano-wire on the surface of the micron-grade silicon column and forming the micro-nano composite structure; and S6: removing residual silver on the surface of the micron-grade silicon column, and doping the micro-nano composite structure to enable the whole nano-wire and the surface of the micron-grade silicon column to be N-shaped. The nano-wire in the micro-nano composite structure disclosed by the invention is vertical to the surface of a micron column, has a large superficial area, high light trapping capability and high current carrier collection rate, and is suitable for preparing a high-efficiency solar battery.

Description

technical field [0001] The invention relates to the field of micro-nano processing, more specifically, to a micro-nano composite structure of a photoanode of a solar cell and a preparation method thereof. Background technique [0002] Global energy is increasingly tense, and scientists around the world are working hard to find renewable and clean new energy sources. The earth reserves of traditional fossil energy are limited, and it will cause serious environmental pollution problems, especially due to the large amount of CO 2 Emissions of gases that warm the global climate have very serious consequences. The search for new energy has become extremely important, which is related to the sustainable development of the whole human being. At present, energy sources such as solar energy, wind energy, water energy, and hydrogen energy are all promising alternative energy sources. Especially solar energy, because of its abundant reserves, green and non-polluting, is widely favor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/0224
CPCY02P70/50
Inventor 廖广兰史铁林盛文军孙博张康汤自荣夏奇
Owner HUAZHONG UNIV OF SCI & TECH
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