GdN film with large magnetoresistance effect, and preparation method thereof
A magnetoresistance and thin-film technology, applied in the field of spintronics, achieves the effect of simple target selection, simple and practical method, and high target utilization rate
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[0041] According to the structure and property analysis results that we carry out to the sample prepared in the present invention, the best embodiment of GdN thin film will be described in detail below to target reactive sputtering method:
[0042] 1) The DPS-III ultra-high vacuum multi-pair magnetron sputtering coating machine produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences is used. The base material is a polished MgO(100) single wafer covered with a mask template. Three different targets are used, including Gd target, Al target, and Ag target with a purity of 99.99%, which are respectively installed on three pairs of target heads. Each pair of targets consists of two targets, and the two targets are placed face to face. One is the N pole of the magnetic force line, and the other is the S pole; the axes between the two face-to-face target surfaces of each pair of targets are parallel to each other, and the distance between e...
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