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Method and system for calibration of vacuum ultraviolet spectrum irradiance

A technology of vacuum ultraviolet light and ultraviolet spectrum, which is applied in the field of vacuum ultraviolet spectral irradiance calibration method and system, and can solve the problem of high cost of vacuum ultraviolet spectral irradiance calibration

Active Publication Date: 2013-06-26
BEIJING ZHENXING METROLOGY & TEST INST
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Problems solved by technology

[0003] In order to solve the problem of high cost of vacuum ultraviolet spectral irradiance calibration in the prior art, a vacuum ultraviolet spectral irradiance calibration method and system are provided, which can conveniently obtain the spectral irradiance of the ultraviolet light source in the vacuum ultraviolet band below 250nm

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  • Method and system for calibration of vacuum ultraviolet spectrum irradiance
  • Method and system for calibration of vacuum ultraviolet spectrum irradiance
  • Method and system for calibration of vacuum ultraviolet spectrum irradiance

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Embodiment Construction

[0027] The following description will enable any person skilled in the art to utilize the present invention. The descriptions provided in the specific embodiments and applications are examples only. Various extensions and combinations of the embodiments described herein will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the invention . Thus, the present invention is not limited to the embodiments shown, but the present invention covers the widest scope consistent with the principles and features shown herein.

[0028] figure 1 A flow chart of a vacuum ultraviolet spectral irradiance calibration method according to an embodiment of the present invention is given.

[0029] Including step 101, obtaining the ultraviolet spectral radiance L(λ) of the ultraviolet light source in the 115nm-400nm band range;

[0030] Wherein, as an embodiment of ...

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Abstract

The invention relates to the technical field of ultraviolet irradiance measurement, in particular to a method and a system for standardization of vacuum ultraviolet spectrum irradiance. The method includes obtaining ultraviolet spectrum irradiance luminance L (lambada) of an ultraviolet source with the wavelength range of 115nm-400nm; obtaining the ultraviolet spectrum irradiance E (lambada) of the ultraviolet source with the wavelength range of 250nm-400nm; obtaining a light source solid angle omega with the wavelength range of 250nm-400nm by utilizing the omega=E (lambada) / L (lambada); obtaining the light source solid angle omega 1 with the wavelength range of 115nm-250nm according to the light source solid angle omega with the wavelength range of 250nm-400nm; and obtaining the ultraviolet spectrum irradiance luminance E 1 (lambada) with the wavelength range of 115nm-250nm according to the formula E I (lambada) = L (lambada) *omega I. By the aid of the method, the problem that lower limit wavelength of the vacuum ultraviolet spectrum irradiance fails to reach 250nm below is solved.

Description

technical field [0001] The invention relates to the technical field of ultraviolet radiation measurement, in particular to a vacuum ultraviolet spectrum irradiance calibration method and system. Background technique [0002] The vacuum ultraviolet band refers to the ultraviolet band that cannot reach the earth's surface due to the strong absorption of the atmosphere and can only propagate in a vacuum. The 110nm-250nm ultraviolet band is usually defined as the vacuum ultraviolet band. In the vacuum ultraviolet spectral irradiance of the light source, it is necessary to obtain the standard value of the spectral irradiance of the standard light source within the calibration band range (115nm-400nm). The vacuum ultraviolet standard light source usually uses a deuterium lamp as the standard light source for spectral irradiance. The National Institute of Standards and Metrology (now known as NIST) also used deuterium lamps as a standard light source for spectral irradiance before...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/00
Inventor 张虎孙红胜李世伟王加朋张玉国孙广尉魏建强
Owner BEIJING ZHENXING METROLOGY & TEST INST
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