Hydrostatic gas bearing and manufacturing method thereof
A technology of hydrostatic gas bearing and bearing, applied in air cushion bearing, bearing, manufacturing tool, etc., can solve the problems of low friction and high cost, and achieve the effect of suppressing self-excited vibration
Active Publication Date: 2016-08-03
OILES CORP
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Problems solved by technology
[0011] Although the above-mentioned conventional hydrostatic gas bearings can realize ultra-low friction, ultra-high precision and ultra-high-speed operation, they have the following problems: high-strength metals and ceramics are mainly used as bearing materials, and high-precision grinding and finishing are required. Therefore, Inevitably high cost
Method used
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Embodiment Construction
[0054] Next, the present invention will be described in further detail based on the example of the preferred embodiment shown in the figure. In addition, the present invention is not limited to these examples.
[0055] in Figure 1 to Figure 4 Among them, the static pressure gas bearing 1 includes: a bearing base 2 made of synthetic resin, and the bearing base 2 is preferably made of thermoplastic synthetic resins such as polyacetal resin, polyamide resin, polyphenylene sulfide resin, or the like. It contains 30-50% by mass of glass fiber, glass powder, carbon fiber or inorganic filler and is formed of a thermoplastic synthetic resin containing a reinforcing filler; a bearing body 3 made of synthetic resin, the bearing body 3 and the bearing base body 2 are integrally welded The bonding is preferably formed of thermoplastic synthetic resin such as polyacetal resin, polyamide resin, and polyphenylene sulfide resin.
[0056] Especially as Figure 5 to Figure 8 As shown, the bearing ...
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Abstract
Comprising: a bearing base (2) made of synthetic resin, the bearing base (2) has a base (4), an annular protrusion (6) and an air supply passage (11), the annular protrusion (6) is formed from the base One side (5) of (4) protrudes integrally, and the air supply passage (11) is provided on the annular protrusion (6) and the base (4), and one end (7) is opened in the annular protrusion The protruding end surface (8) of (6) is opened at the outer peripheral surface (10) of the base (4) at the other end (9); and the bearing body (3) made of synthetic resin, the bearing body (3) has an annular recess (42), an annular groove (44) and a plurality of air blowing holes (47), the annular recess (42) is formed on one side (41) opposite to one side (5) of the base (4) And the annular protrusion (6) of the bearing base (2) is accommodated, the annular groove (44) is opened on the other side (43), and a plurality of air blowing holes (47) are formed as self-contained throttling The hole communicates with the annular groove (44) at one end (45) and opens into the annular recess (42) at the other end (46).
Description
Technical field [0001] The invention relates to a static pressure gas bearing and a manufacturing method thereof. Background technique [0002] As a bearing that can realize ultra-low friction, ultra-high precision, and ultra-high-speed motion, hydrostatic gas bearings are used for object handling, ultra-precision processing of horizontal movement, and ultra-precision measurement. As the throttling form of the air outlet of the static pressure gas bearing, there are porous throttling, surface throttling, small hole throttling, self-contained throttling, etc. The load capacity and bearing rigidity can be adjusted according to different applications. Use it aside. [0003] For example, in Patent Document 1, as a gas bearing device that can maintain high rigidity and achieve high attenuation properties, a gas bearing device is proposed, which has two opposed substantially parallel bearing surfaces. And at least one gas channel that supplies gas to the bearing gap between the two bea...
Claims
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IPC IPC(8): F16C32/06
CPCF16C32/0622F16C32/0666F16C2370/00F16C2326/58F16C2240/70Y10T29/49639Y10T29/4971F16C2240/40F16C2208/52F16C2208/20F16C32/06F16C33/00B23K26/364B21D53/10F16C33/20F16C33/208F16C43/02
Inventor 佐藤光
Owner OILES CORP