Static-pressure gas bearing and method for manufacturing same
A technology of hydrostatic gas bearing and bearing, applied in air cushion bearing, bearing, manufacturing tool, etc., can solve the problems of low friction and high cost, and achieve the effect of suppressing self-excited vibration
Active Publication Date: 2013-07-24
OILES CORP
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Problems solved by technology
[0011] Although the above-mentioned conventional hydrostatic gas bearings can realize ultra-low friction, ultra-high precision and ultra-high-speed operation, they have the following problems: high-strength metals and ceramics are mainly used as bearing materials, and high-precision grinding and finishing are required. Therefore, Inevitably high cost
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[0054] Next, the present invention will be described in further detail based on examples of preferred embodiments shown in the drawings. In addition, this invention is not limited to these examples.
[0055] exist Figure 1 to Figure 4 Among them, the static pressure gas bearing 1 includes: a bearing base 2 made of synthetic resin, the bearing base 2 is preferably made of thermoplastic synthetic resins such as polyacetal resin, polyamide resin, polyphenylene sulfide resin, or made of these thermoplastic synthetic resins It is formed of thermoplastic synthetic resin containing 30-50% by mass of glass fiber, glass powder, carbon fiber or inorganic filler containing reinforcing filler; the bearing body 3 made of synthetic resin, the bearing body 3 and the bearing base 2 are integrally welded The joint is preferably formed of a thermoplastic synthetic resin such as polyacetal resin, polyamide resin, polyphenylene sulfide resin, or the like.
[0056] especially if Figure 5 to F...
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Abstract
Provided are: a synthetic-resin bearing base (2) provided with a base (4), an ring-shaped protruding part (6) integrally projecting from one surface (5) of the base (4), and an air-supply channel (11) that opens at one end (7) on the protruding end surface (8) of the ring-shaped protruding part (6) and at the other end (9) at the outer circumferential surface (10) of the base (4) and is provided in the ring-shaped protruding part (6) and the base (4); and a synthetic-resin bearing (3) having an ring-shaped depression (42) formed in one surface (41) facing one surface (5) of the base (4), the depression accommodating the ring-shaped protruding part (6) of the bearing base (2), and a plurality of air-outflow holes (47) acting as an annular restrictor, communicating at one end (45) with a ring-shaped concave groove (44) opening at the other surface (43), and opening to the ring-shaped depression (42) at the other end (46).
Description
technical field [0001] The present invention relates to a hydrostatic gas bearing and a method of manufacturing the same. Background technique [0002] As a bearing capable of ultra-low friction, ultra-high precision, and ultra-high-speed motion, hydrostatic gas bearings are used for conveyance of objects, ultra-precision machining of horizontal movement, and ultra-precision measurement. As the throttling form of the air outlet of the static pressure gas bearing, there are porous throttling, surface throttling, small hole throttling, self-contained throttling, etc., and the load capacity and bearing rigidity can be adjusted according to different applications. side use. [0003] For example, in Patent Document 1, a gas bearing device having two opposing substantially parallel bearing surfaces is proposed as a gas bearing device capable of maintaining high rigidity and achieving high damping properties. and at least one gas passage for supplying gas to the bearing gap betwe...
Claims
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IPC IPC(8): F16C32/06
CPCF16C33/20F16C2326/58F16C43/02F16C32/0666F16C33/208F16C2370/00B21D53/10F16C32/0622F16C2240/70Y10T29/49639Y10T29/4971F16C2240/40F16C2208/52F16C2208/20F16C32/06F16C33/00B23K26/364
Inventor 佐藤光
Owner OILES CORP