Pressure sensor
A pressure sensor and sensor technology, applied in the direction of measuring fluid pressure, instruments, pressure difference measurement between multiple valves, etc., can solve the problems of weak frequency correlation of pressure sensitivity, increased noise, non-correlation, etc., and achieve improvement The effect of detection accuracy
Active Publication Date: 2013-09-18
SEIKO INSTR INC
View PDF6 Cites 10 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] In addition, in the pressure sensor according to the above-mentioned prior art, for example, depending on the material shape of the sensing part, etc., the frequency dependence of the sensitivity to the pressure is weak or non-correlated, and the sensitivity to a wide frequency band is substantially the same. In this situation, the noise caused by signals in other frequency bands increases compared to signals in the desired frequency band, and there is a concern that the output of the pressure sensor may be saturated by signals other than the desired frequency band.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0031] Next, a pressure sensor according to an embodiment of the present invention will be described with reference to the drawings.
[0032] The pressure sensor 10 according to the present embodiment includes, for example: two pressure fluctuation sensors 11 (for example, a first pressure fluctuation sensor (P1) 11a and a second pressure fluctuation sensor (P2) 11b) having frequency characteristics different from each other; The detection circuit 12 detects the difference between the outputs of the two pressure fluctuation sensors 11, and the pressure sensor 10 outputs a signal corresponding to fluctuations in pressure (for example, air pressure, etc.).
[0033] The pressure fluctuation sensor 11 of the pressure sensor 10 is made of, for example, a silicon support layer, SiO 2 Formed oxide layer and silicon active layer thermally bonded SOI substrate, etc., such as figure 1 As shown in (A) and (B), it includes a cavity 21 , a cantilever 22 , a gap 23 and a piezoresistor 24 ....
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have the same distance of a gap, and have frequency characteristics different from each other, that is, cutoff frequencies different from each other by setting the value of a capacity of the cavity of the first pressure variation sensor to be larger than the value of a capacity of the cavity of the second pressure variation sensor. Thereby, vibration caused by detection error and disturbance is reduced, and desired frequency characteristics are obtained.
Description
technical field [0001] The present invention relates to pressure sensors. Background technique [0002] Conventionally, for example, there has been known a differential pressure sensor (pressure sensor) in which two pressure sensor elements of a double-face pressure type are placed close to each other on two symmetrical pressure introduction paths and arranged so that their polarities are opposite to each other. The outputs of the two pressure sensor elements are differentially amplified to obtain an output that cancels out detection errors due to temperature characteristics of the pressure sensor elements and vibration due to disturbances (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Patent Application Laid-Open No. 4-29027. [0004] In addition, in the pressure sensor according to the above-mentioned prior art, for example, depending on the material shape of the sensing part, etc., the frequency dependence of the sensitivity to the pressu...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01L13/06
CPCG01L9/0019G01L13/02
Inventor 内山武新荻正隆
Owner SEIKO INSTR INC