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Pressure Sensor

一种压力传感器、传感器的技术，应用在测量流体压力、仪器、多个阀之间的压力差测量等方向，能够解决压力的灵敏度频率相关性弱、非相关、噪声增大等问题，达到提高检测精度的效果

Active Publication Date: 2016-08-24
SEIKO INSTR INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In addition, in the pressure sensor according to the above-mentioned prior art, for example, depending on the material shape of the sensing part, etc., the frequency dependence of the sensitivity to the pressure is weak or non-correlated, and the sensitivity to a wide frequency band is substantially the same. In this situation, the noise caused by signals in other frequency bands increases compared to signals in the desired frequency band, and there is a concern that the output of the pressure sensor may be saturated by signals other than the desired frequency band.

Method used

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Embodiment Construction

[0031] Next, a pressure sensor according to an embodiment of the present invention will be described with reference to the drawings.

[0032] The pressure sensor 10 according to the present embodiment includes, for example: two pressure fluctuation sensors 11 (for example, a first pressure fluctuation sensor (P1) 11a and a second pressure fluctuation sensor (P2) 11b) having frequency characteristics different from each other; The detection circuit 12 detects the difference between the outputs of the two pressure fluctuation sensors 11, and the pressure sensor 10 outputs a signal corresponding to fluctuations in pressure (for example, air pressure, etc.).

[0033] The pressure fluctuation sensor 11 of the pressure sensor 10 is made of, for example, a silicon support layer, SiO 2 Formed oxide layer and silicon active layer thermally bonded SOI substrate, etc., such as figure 1 As shown in (A) and (B), it includes a cavity 21 , a cantilever 22 , a gap 23 and a piezoresistor 24 ....

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Abstract

The pressure sensor of the present invention includes a detection circuit that detects the difference between the outputs of the first pressure fluctuation sensor ( P1 ) ( 11 a ) and the second pressure fluctuation sensor ( P2 ) ( 11 b ). Regarding the first pressure fluctuation sensor (P1) (11a) and the second pressure fluctuation sensor (P2) (11b), make the distance (G) of the mutual gap (23) the same, by making the first pressure fluctuation sensor (P1) ( The capacity (V1) of the cavity (21) of 11a) is larger than the capacity (V2) of the cavity (21) of the second pressure fluctuation sensor (P2) (11b), thus having different frequency characteristics, for example, different frequency characteristics. Cutoff frequency (fc1, fc2 (>fc1)). Thereby, detection errors and vibrations caused by disturbances, etc. are reduced, and desired frequency characteristics are obtained.

Description

technical field [0001] The present invention relates to pressure sensors. Background technique [0002] Conventionally, for example, there has been known a differential pressure sensor (pressure sensor) in which two pressure sensor elements of a double-face pressure type are placed close to each other on two symmetrical pressure introduction paths and arranged so that their polarities are opposite to each other. The outputs of the two pressure sensor elements are differentially amplified to obtain an output that cancels out detection errors due to temperature characteristics of the pressure sensor elements and vibration due to disturbances (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Patent Application Laid-Open No. 4-29027. [0004] In addition, in the pressure sensor according to the above-mentioned prior art, for example, depending on the material shape of the sensing part, etc., the frequency dependence of the sensitivity to the pressu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L13/06
CPCG01L9/0019G01L13/02
Inventor 内山武新荻正隆
Owner SEIKO INSTR INC