Wafer test data processing method and system

A data processing system and test data technology, applied in the direction of electrical digital data processing, special data processing applications, error detection/correction, etc., can solve the problems of changing the status quo, unfavorable data analysis, and unrealizable special formats, etc. The effects of scalability, high processing efficiency, and convenient data analysis

Inactive Publication Date: 2014-05-14
CSMC TECH FAB2 CO LTD
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Problems solved by technology

As far as the current situation is concerned, it is very unfavorable for data analysis
The existing technology can read data in the above format, but the special format cannot be realized, so it is urgent to change the status quo
The data in the text-like format is automatically generated by the Lucent test system in the UNIX environment during the test, and it is also a built-in function of the test system, which cannot meet the growing needs of multi-system and multi-data source sharing

Method used

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  • Wafer test data processing method and system
  • Wafer test data processing method and system
  • Wafer test data processing method and system

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Embodiment Construction

[0039] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0040] ginseng figure 1 Shown, a kind of wafer test data processing method of the present invention comprises the following steps:

[0041] S1. The machine tests the wafers sequentially to obtain test data in a text-like format:

[0042] Referring to the following table 1, it shows the text-like format test data obtained in an embodim...

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Abstract

The invention discloses a wafer test data processing method and system. The method includes steps of 1, testing wafers through a machine, and acquiring text format testing data; 2, extracting the text format testing data, and converting into XML format testing data; 3, performing multiple address storage on the converted XML format testing data. According to the method, data arrangement and classifying are performed on the text format testing data acquired by the system, and the text format testing data are converted into superimposed and nested XML format testing data, so that multiple information can be extracted in a separated manner, international factory requirements can be met, and data can be prevented from being stored in other formats; meanwhile, according to architecture design of XML format data, format remains consistently, processing efficiency is high, the architecture design can be applied in other systems and methods, data analysis is facilitated, and factory production requirements and future test scalability can be met.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a wafer testing data processing method and system thereof. Background technique [0002] The wafer test data in the prior art is arranged line by line, and it is only necessary to sequentially read and store the data in the following format by using a text reading method. At present, the reading of data is limited to the Lucent test system, and there is no efficient reading method for the WINDOWS system. When the amount of data is large, the reading is very slow. As far as the current situation is concerned, it is very unfavorable for data analysis. Existing technology can read data in the above format, but the special format cannot be realized yet, so it is urgent to change the status quo. The data in the text-like format is automatically generated by the UNIX environment Lucent test system during testing, and it is also a function of the test system itself, whic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/30
CPCG06F11/2268
Inventor 许文慧连晓谦
Owner CSMC TECH FAB2 CO LTD
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