High-efficiency air filter scanning leak detection device and leak detection method

A filter and leak detection technology, applied in the direction of using liquid/vacuum for liquid tightness measurement, etc., can solve the problems of reducing the efficiency of scanning leak detection, easy air leakage, affecting the detection results, etc., to simplify the realization of the control system, improve the Effective transmission distance, convenient control system to achieve the effect

CN104111144BInactive Publication Date: 2016-09-21SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI +1
8 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2016-09-21
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

A high-efficiency air filter scanning leak detection device and leak detection method, the device includes an air duct system, an air flow conversion device, a detection platform, a two-dimensional scanning mechanism, a detection system and a control system. The present invention is characterized in that it can accurately and quickly locate the leakage point, and display the distribution of the leakage point in real time in three-dimensional graphics, and meets the standard requirements.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a high-efficiency / ultra-high-efficiency air filter, in particular to a high-efficiency air filter scanning leak detection device and a leak detection method. Background technique

[0002] With the increase of requirements for clean environment in various industries, the detection of filters is becoming more and more stringent. For high-efficiency / ultra-high-efficiency filters used in industries such as semiconductors and biopharmaceuticals, the most stringent most penetrating particle size (MPPS) method has been adopted internationally to meet the quality requirements of these high-tech filters for high-efficiency filters. Some such devices have already been arranged at present, but there are still many deficiencies. [Patent: High-efficiency and ultra-high-efficiency air filter filtration efficiency detection system, application number 200610014363.6, publication number CN 1895732A] discloses a high-efficiency\ultra-high-effic...

Examples

Embodiment Construction

[0036] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0037] figure 1 It is a general drawing of the embodiment of the leak detection device of the present invention (the main figure is a front view, and the detection platform 16 is a general term for the components related to scanning leak detection, as can be seen from the figure, the scanning leak detection device of the high-efficiency air filter of the present invention includes an air duct system , air flow conversion device 15, detection platform 16, two-dimensional scanning mechanism 161, detection system and control system, the air duct system, air flow conversion device and detection platform are connected together in sequence; Efficiency filter 3, blower fan 1, high efficiency filter 5, mixing chamber 6, nozzle device 8, main flow valve 11 and bypass valve 10, the output end of aerosol generator 9 is connected to the input end of descr...