An explosion-proof multi-component dynamic gas distribution device and method

Abstract

The invention discloses an explosion-proof multi-component dynamic gas distribution device and method, including a low-pressure gas distribution system 15, an air compression generating device 16, a booster system 17, a vacuum system 18, and a filling system 19; a back pressure valve is used It effectively ensures that the pressure of the gas at the outlet end of the back pressure valve is stable before entering the gas mixer, thereby achieving an explosion-proof effect. The frequency conversion diaphragm compressor can not only ensure the high purity of the product gas and no impurity gas pollution; but also stabilize the pressure in the low-pressure gas distribution channel within the safe pressure range by adjusting the working frequency of the frequency conversion diaphragm compressor, thereby achieving an explosion-proof effect . The gas flow is controlled in real time by distributing the flow control ranges of the n mass flow controllers in a trapezoidal manner, thereby improving the precision of gas distribution. Use the air generated by the air compressor as the dilution air channel to save costs. During the gas distribution process, the alarm function can be realized.

Description

technical field [0001] The invention relates to a multi-component dynamic gas distribution technology, in particular to the preparation and filling of standard mixed gas, belonging to the field of gas distribution of mixed gas. Background technique [0002] The role of reference materials is to achieve accurate and consistent measurements and ensure traceability of values. Standard gas is one of the most widely used standard substances, and has been widely used in scientific research, industrial production, environmental protection, calibration of instruments and meters, inspection of chemical products and other fields. With the rapid development of the national economy, the consumption of standard gas is increasing, and the requirements for standard gas are also increasing. Therefore, practical and effective measures must be taken to formulate high-quality standard gas that meets user requirements while ensuring safety. [0003] The design of the present invention mainly ...

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Problems solved by technology

[0004] In the traditional gas distribution device, the instability of the pressure in the gas distribution channel can easily lead to an explosion during the gas distribution process. Ensuring the pressure stability of the gas distribution channel is the key to ensuring the safety of gas distribution

In addition, the airtightness of the gas compressors commonly used at present is not good, and the outside air is easy to infiltrate, resulting in a decrease in the purity of the mixed standard gas; and the power consumption is high; in the traditional gas distribution process, the gas flow rate of the gas distribution channel is not sufficient. Achieve multi-range control, resulting in inaccurate gas distribution

When the diluent gas is air, the synthesized air cannot be as real as the ratio of components in real air, which will greatly reduce the accuracy of gas distribution

During the gas distribution process, if the flow rate of the gas flowing out of the mass flow controller fluctuates greatly, the standard gas ratio will be inaccurate, or even explode.

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