A broadband angle selective optical filter and its preparation method
An optical filter and angle selection technology, applied in optics, optical components, instruments, etc., can solve the problems of not supporting broadband laser output, etc., and achieve the effect of simple structure and good filter consistency
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Embodiment 1
[0049] See attached figure 1 , which is a schematic cross-sectional view of the structure of a broadband angle-selective optical filter system provided in this embodiment. Parallel incident light 3 passes through the first binary phase diffraction grating 11 to form multi-order first diffracted light 4, which respectively enters corresponding volume Bragg gratings 21a and 21b, 22a and 22b, 23a and 23b, and passes through the volume Bragg gratings. The second diffracted light after grating transmission and diffraction continues to enter the second binary phase diffraction grating 12 to complete broadband optical filtering and output parallel output light 5 .
[0050] Binary Diffraction Grating as Dielectric SiO 2 、BK 7 Direct etching on substrate etching, and MgF plating on substrate surface 2 , ZnS, ZnO and other transparent optical film materials and etched binary phase grating structure; volume Bragg grating is a volume diffraction optical device made of light-sensitive g...
Embodiment 2
[0059] In the broadband angle selective filter provided in this embodiment, the diffraction orders of the binary diffraction grating are 0 and ±1, and its structure and preparation method are as in Embodiment 1. See attached Image 6 , which is a graph of the transmittance of the binary diffraction grating in the broadband angle selective filter provided by this embodiment, with 0 and ±1 order diffracted light varying with the thickness of the grating. Depend on Image 6 It can be seen that the period of the binary diffraction grating provided in this embodiment is 1.0 μm, the duty ratio is 0.45, and the wavelength of the incident light is 808 nm. The transmittance of diffracted light at all levels changes periodically with the thickness of the grating. When the thickness of the grating is in the range of 0.02μm~4.0μm, the total transmittance of the transmitted light remains between 0.94~0.96 (curve 1); when the thickness of the grating is 0.72μm, 2.2μm and 3.64μm, the corre...
Embodiment 3
[0061] This embodiment provides that the diffraction orders of the binary diffraction grating in the broadband angle selection filter are 0, ±1 and ±2, and its structure and preparation method are as in Embodiment 1. See attached Figure 7 , which is a graph of the transmittance curves of 0, ±1 and ±2 order diffracted light in the binary diffraction grating in the broadband angle selective filter provided in this embodiment as the thickness of the grating changes. Depend on Figure 7 It can be seen that the period of the binary diffraction grating provided in this embodiment is 1.25 μm, the duty ratio is 0.45, and the incident light wavelength is 808 nm. The transmittance of diffracted light at all levels changes periodically with the thickness of the grating. When the thickness of the grating is in the range of 0.02 μm to 4.0 μm, the total transmittance of the transmitted light remains between 0.953 and 0.98 (curve 1); the thickness of the grating is 0.82 μm and 2.46 μm res...
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