Seed layer for ZnO and doped- ZnO o thin film nucleation and methods of seed layer deposition

Abstract

Zinc oxide layer, including pure zinc oxide and doped zinc oxide, can be deposited with preferred crystal orientation and improved electrical conductivity by employing a seed layer comprising a metallic element. By selecting metallic elements that can easily crystallized at low temperature on glass substrates, together with possessing preferred crystal orientations and sizes, zinc oxide layer with preferred crystal orientation and large grain size can be formed, leading to potential optimization of transparent conductive oxide layer stacks.

Description

technical field [0001] The present invention relates to low-e panels, and more particularly to low-e panels having a seed layer to improve the crystallization of ZnO or doped ZnO and methods for forming such low-e panels. Background technique [0002] Solar control glass is commonly used in areas such as architectural glazing and vehicle glazing, typically providing high visible light transmission and low emissivity. High visible light transmission allows more sunlight to pass through the glazing and is thus desirable in many glazing applications. Low emissivity blocks infrared (IR) radiation to reduce unwanted internal heating. [0003] In low-E glass, IR radiation is mostly reflected with minimal absorptivity and emissivity, thereby reducing heat transfer to and from low-E surfaces. Typically solar control glass generally has an emissivity of about 0.1 and a light transmission of about 80%. High-transmittance, low-E glasses typically include reflective metallic films su...

AI Technical Summary

Problems solved by technology

However, as the thickness of the silver layer increases, the visible light transmittance of the reflective layer decreases, the manufacturing throughput also decreases, and the overall manufacturing cost increases

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