Method and device for generating broadband continuously tunable coherent extreme ultraviolet source
An extreme ultraviolet light source and wide-spectrum technology, which is applied in the field of generating a wide-spectrum continuously tunable coherent extreme ultraviolet light source, can solve the problems of constrained tunable extreme ultraviolet light source application, cannot realize continuous tuning of extreme ultraviolet light source at the same time, etc. The effect of tuning
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[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0024] The invention provides a method for generating a wide-band continuously tunable coherent extreme ultraviolet light source, the method comprises: generating a femtosecond laser beam, focusing the laser beam on a working gas, and combining the laser beam and the The working gas interacts to generate high-order harmonics; adjusting the incident energy of the laser beam or the pressure of the...
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