Decoupling control method and system for temperature field regional control system
A partition control and decoupling control technology, which is applied in the direction of temperature control using electric mode, auxiliary controller with auxiliary heating device, etc., can solve problems such as difficult decoupling and complex decoupling algorithm
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[0031] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0032] In order to apply the method and system for decoupling control of the temperature field partitions proposed in the present invention, a chip curing furnace is selected as a specific implementation object. There are often several heating plates in the actual chip curing furnace, and each heating plate corresponds to a temperature zone, and they affect each other. For a certain point on the substrate, its temperature is the superposition result of the thermal effects of multiple heating plates. , it is difficult to precisely control the temperature, thus affecting the quality of chip curing. It can be seen that there is strong coupling between the temperature fields in the chip curing furnace, and decoupling control is required.
[0033] Such as figure 1 As shown, it is a schematic diagram of the hardware connection to realize the decoupling cont...
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