A silicon-based slot waveguide integrated optical power splitter

Abstract

The invention discloses a silicon-based groove waveguide integrated type optical power splitter, which can be applied to the field of silicon-based photonics. The output end of an input nano wire waveguide (1) is connected to a taper transition waveguide (2). The output end of the taper transition waveguide (2) is connected to an embedded sub-wavelength grating type multi-mode waveguide (3). A first mode conversion waveguide (51), a second mode conversion waveguide (52), a first output groove waveguide (61) and a second output groove waveguide (62) are positioned at the two sides of the embedded sub-wavelength grating type multi-mode waveguide (3). A sub-wavelength grating (4) is positioned in the middle of the embedded sub-wavelength grating type multi-mode waveguide (3). The silicon-based groove waveguide integrated type optical power splitter has the advantages of being low in insertion loss and low in reflection loss, enabling balanced power splitting, being convenient to manufacture, etc. Moreover, the optical power splitter can be integrated with a groove waveguide type Mach-Zehnder interferometer type optical modulator, and then the performance of a silicon-based optical modulator can be further improved.

Description

technical field [0001] The invention relates to the technical field of integrated optics, in particular to a silicon-based slot waveguide integrated optical power splitter. Background technique [0002] Since the slot waveguide was proposed by the research group of Professor Michal Lipson of Cornell University in 2004, it has attracted the attention of many researchers. Its structure is mainly composed of two silicon-based nanowires close together, and a nano-groove is formed in the middle. According to the boundary value relationship of the electromagnetic field, the electric field component will appear discontinuous and obvious in the low-refractive-index groove on the interface perpendicular to the waveguide interface. Enhanced, according to which a variety of optical functional devices have been designed and manufactured. Compared with ordinary silicon-based nanowires, the slot waveguide provides an additional degree of design freedom, that is, a variety of electro-opti...

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Problems solved by technology

However, due to the mismatch between the mode of the input / output nanowire waveguide and the mode of the slot waveguide, an additional mode converter needs to be used, which will obviously increase the complexity of device design and fabrication, and is not conducive to the dense integration of devices.

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