A method of manufacturing a sensor with a reference capacitance

A reference capacitor and sensor technology, applied in radiation control devices, etc., can solve the problem of increasing the thickness of the sensor, and achieve the effect of eliminating the need for circuit boards, ensuring thinner, and reducing thickness

Active Publication Date: 2019-09-20
JIANGSU TIWIN OPTO ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, for sensors, a reference capacitor is generally used for reference to obtain accurate sensing results, but the superposition of capacitors in the thickness direction greatly increases the thickness of the sensor

Method used

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  • A method of manufacturing a sensor with a reference capacitance
  • A method of manufacturing a sensor with a reference capacitance
  • A method of manufacturing a sensor with a reference capacitance

Examples

Experimental program
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Embodiment Construction

[0027] see Figure 2-8 , a sensing device 2 with a reference capacitance, comprising:

[0028] A first substrate 21a, which may be a silicon substrate, on which electronic elements (semiconductor elements) are formed, said first substrate 21a comprising a front surface having a first semiconductor element 22a and a back surface opposite to said front surface;

[0029] The groove 25 on the back side of the first substrate 21a, the depth of the groove 25 is less than or equal to half of the thickness of the first substrate, and the bottom of the groove 25 should be far away from the first semiconductor element 22a ;

[0030] The second substrate 21b fixed on the bottom of the groove 25, the second substrate 21b includes a front with the second semiconductor element 22b and a back opposite to the front, the front of the second substrate 21b is in contact with the front The back side of the first substrate 21a is coplanar;

[0031] The capacitor parallel to the side surface of ...

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Abstract

The invention provides a method for manufacturing a sensor with a reference capacitor, which comprises the steps of (1) providing a substrate, wherein the first substrate comprises an obverse side provided with a first light receiving area and a reverse side opposite to the obverse side; (2) manufacturing a groove at the reverse side of the first substrate, wherein the depth of the groove is less than or equal to half of the thickness of the first substrate; (3) providing a second substrate, and fixing the second substrate in the groove, wherein the second substrate comprises an obverse side provided with a second light receiving area and a reverse side opposite to the obverse side, and the obverse side of the second substrate and the reverse side of the first substrate are in the same plane; and (4) manufacturing a vertical capacitor, wherein the capacitor is parallel to the side surface of the first substrate, and the capacitor is coated by an insulating material.

Description

technical field [0001] The invention relates to the sensor field of sensitive components, in particular to a method for manufacturing a sensor with a reference capacitance. Background technique [0002] The simplest electronic device in the photosensitive sensor is the photoresistor, which can sense the light and dark changes of the light, output a weak electrical signal, and control the automatic switch of the LED lamp through simple electronic circuit amplification. Therefore, it is widely used in automatic control and household appliances. For remote lighting fixtures, such as: automatic brightness adjustment in TVs, automatic exposure in cameras; The stop device and the anti-theft alarm device are medium. [0003] Photosensitive sensor is one of the most common sensors. It has a wide variety, mainly including: photocell, photomultiplier tube, photoresistor, phototransistor, solar cell, infrared sensor, ultraviolet sensor, fiber optic photoelectric sensor, color sensor, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146
Inventor 王汉清
Owner JIANGSU TIWIN OPTO ELECTRONICS TECH
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