A kind of electro-magnetically controlled structure based on ndfeb and its preparation method and application
An electric control and magnetic effect technology, applied in the manufacture/processing of electromagnetic devices, material selection, etc., can solve problems such as the influence of ferroelectric properties, the influence of NdFeB phase formation, and the difficulty of NdFeB thin films
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Embodiment 1
[0059] The composition of the NdFeB target is: Nd x Fe 89-x B 11 (x=12),
[0060] The annealing conditions are: 700°C, annealing for 3min,
[0061] The composition of the heterojunction is: Ta(100nm) / NdFeB(200nm) / Ta(0nm) / PMN-PT(111).
Embodiment 2
[0063] The composition of the NdFeB target is: Nd x Fe 89-x B 11 (x=20),
[0064] The annealing conditions are: 700°C, annealing for 3min,
[0065] The composition of the heterojunction is: Ta(100nm) / NdFeB(200nm) / Ta(10nm) / PMN-PT(001).
Embodiment 3
[0067] The composition of the NdFeB target is: Nd x Fe 89-x B 11 (x=16),
[0068] The annealing conditions are: 700°C, annealing for 1min,
[0069] The composition of the heterojunction is: Ta(100nm) / NdFeB(200nm) / Ta(10nm) / PMN-PT(011).
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