A kind of test method of quantum efficiency

Abstract

The invention provides a quantum efficiency testing method comprising the following steps: setting a light source in a light inlet of a monochromator; setting an optical power meter in a light outlet of the monochromator so as to fully receive the emitting light of the monochromator; arranging a to-be-tested photoreceptor on a displacement device, wherein the optical power meter can obtain the optical power of the set position on the set position, and the displacement device is evenly driven in a set time period so as to enable the photoreceptor to fully receive the emitting light of the monochromator, thus carrying out imaging; obtaining the image grey level of the image formed by the photoreceptor, and obtaining the quantum efficiency of the photoreceptor according to the image grey level and the optical power. The testing method can test the quantum efficiency of the photoreceptor, and the test result is high in precision.

Description

technical field [0001] The invention relates to the technical field of electronic measurement methods, and more specifically, relates to a quantum efficiency test method. Background technique [0002] With the continuous development of science and technology, high-resolution and high-sensitivity photosensitive devices, such as CCD sensors and CMOS sensors, are required in applications such as image acquisition, hyperspectral imaging, particle imaging velocimetry, and fast-moving target tracking and positioning. In order to meet the requirements of work and use, there is a high requirement for the quantum efficiency of the photosensitive device, and the repeatability test accuracy of the quantum efficiency of the photosensitive device must be less than 3%. [0003] The test method of quantum efficiency in the prior art is the integrating sphere test method. The integrating sphere test method uses a monochromator to split light from the light source to obtain monochromatic lig...

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Problems solved by technology

[0004] However, since the exit angle of the light emitted by the integrating sphere is very large, and the light intensity will decrease gradually with the increase of the distance, in order to increase the light energy of the light emitted by the integrating sphere, it is necessary to increase the half-peak width of the light emitted by the monochromator, and then The test resolution is very low and the test error is large

Moreover, in the test process, the test position of the optical power meter and the test position of the photosensitive device to be tested will have a certain error due to manual placement, so that the error of the repeatability test result of the photosensitive device to be tested is large, and due to human factors The influence will also cause large errors in the test results

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