A four-wire sensitive structure silicon micromachined three-axis jet gyroscope

Abstract

The application discloses a four-wire sensitive structured silicon microchemical triaxial jet gyroscope, comprising a four-wire sensitive structured jet angular velocity sensing element and a PCB (printed circuit board) electrically connected to the same, wherein the sensing element comprises a pressure ring, a piezoelectric ceramic circular vibrator, a PMMA (polymethyl methacrylate) plate and a silicon plate; the piezoelectric ceramic circular vibrator is embedded onto the PMMA plate, and the edge of the vibrato is fixed through the pressure ring; the PMMA plate is provided with an air passage; the silicon plate is provided with an air passage and hot wires; the PMMA plate and the silicon plate are boned in sequence to form the four-wire sensitive structured jet angular velocity sensing element. A novel triaxial sensing principle that may sense angular velocities of three orthogonal axes, X, Y and Z axes, just by using four hot wires; the sensing element only has two layers; therefore, the jet gyroscope has few hot wires, simple structure, high yield and low power consumption and can the angular velocities of three orthogonal directions (X, Y and Z), the multiple axes are integrated, the sensitivities of the three directions are of same order of magnitude, and the practicality is high.

Description

technical field

[0001] The invention belongs to the technical field of detecting the angular velocity and attitude parameters of a moving body by using a Coriolis force deflected jet sensitive body, and in particular relates to a silicon micro-silicon that can be sensitive to the angular velocity of three orthogonal axes—X, Y, and Z—with only four hot wires. Mechanical three-axis jet gyroscope. Background technique

[0002] At present, the sensitive elements of micro-gyroscopes represented by micro-mechanical vibrating gyroscopes are composed of vibrating parts with different structures, which are not only easily broken or damaged under slightly high acceleration shocks, but also require vacuum packaging in order to reduce damping during the manufacturing process. Complex, causing fatigue damage when working for a long time. In contrast, jet gyroscopes do not require vibrating parts, have a simple structure, can withstand high overload, long life and low cost, which are inc...

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