The present invention discloses a micro accelerator. The device comprises an upper cover plate, a
mass block, a lower cover plate, a
cantilever beam and an
enclosure frame. The upper cover plate and the lower cover plate are oppositely arranged to form a space, one end of the
enclosure frame is connected with the lower surface of the upper cover plate, and the other end of the
enclosure frame is connected with the upper surface of the lower cover plate; the
mass block is connected with the enclosure frame though the
cantilever beam and is arranged in the space formed by the upper cover plate and the lower cover plate; and the
cantilever beam has a bending shape and is configured to support the
mass block to move up and down in the space formed by the upper cover plate and the lower cover plate. The present invention further discloses the manufacturing method of the micro accelerator. The method comprises
curtain coating,
punching and through-hole filling, alignment, lamination, cofiring, assembling and detection, etc. The LTCC difference capacitive micro accelerator has the cantilever beam which has a bending shape such as a U-shaped structure, and is simple in preparation; and moreover, the micro accelerator is low in measurement result drifting, small in temperature effect and high in sensitivity, small in detection
modal stiffness, small in cross
coupling and good in combination property.