Two degrees of freedom scott-russell flexible micro-nano positioning platform

Abstract

The invention discloses a two-degree-of-freedom scott-russell flexible micro-nano positioning platform. The invention adopts piezoelectric ceramics with high natural frequency as the driving element, and at the same time, in order to maintain good decoupling performance when realizing a large output displacement, A bridge-type amplifying mechanism with a large amplification ratio and good decoupling is used as the primary displacement amplifying mechanism. The present invention introduces the scott-russell mechanism as the secondary displacement amplification mechanism, adopts the scott-russell mechanism as the displacement amplification mechanism, and has the characteristics of superior motion decoupling performance and good guiding performance; the present invention introduces cross-shaped decoupling structures evenly distributed in the center of the movement Around the platform, the stiffness of the cross-shaped decoupling structure is small in the target motion direction, and relatively large in the non-target motion direction, which is not only conducive to output displacement, but also has good decoupling performance. Ensure high positioning accuracy.

Description

technical field [0001] The invention relates to a two-degree-of-freedom scott-russell flexible micro-nano positioning platform. The positioning platform is driven by piezoelectric ceramics, has two degrees of freedom in XY, and can realize independent translational motion in two directions. Background technique [0002] The flexible micro-nano positioning platform is the core component of modern high-tech manufacturing equipment and precision sports equipment. It has a wide range of applications in high-tech fields such as high-resolution microscope servo scanning, precise optical detection and tracking, and manufacturing and assembly of micro- and nano-scale components, and will play an increasingly important role. [0003] The document Design of a Large Range XY Nanopositioning System proposes a two-degree-of-freedom micro-nano operating platform based on a flexible leaf spring unit, which can achieve linear degrees of freedom in both XY directions; similarly, the documen...

AI Technical Summary

Problems solved by technology

[0005] Chinese patent 105006255A proposes a flexible micro-positioning platform. The platform uses piezoelectric ceramics to achieve displacement output in the target direction. Combined with the characteristics of spherical flexible hinges, it achieves high-precision displacement output and avoids the coupling of various motion directions. The platform does not adopt an enlarged structure and cannot achieve a large displacement output. In addition, the platform has a complex structure, large volume, and difficult processing

[0006] At present, the main flexible micro-nano positioning platform is a flexible motion platform with piezoelectric ceramics as the driving element. Most of the motion platforms are directly driven by piezoelectric ceramics, but the travel range of piezoelectric ceramics is small, and the output displacement of the platform often cannot reach Larger working space requirements; some micro-nano positioning platforms that use lever mechanism as the amplification mechanism often sacrifice the decoupling performance of the platform, which causes the platform to shift during the movement process and cannot meet the needs of horizontal independent movement; Some of the two-degree-of-freedom micro-nano platforms studied have many parts, and each part is processed separately, resulting in a large error of the micro-nano positioning platform after assembly, and the positioning accuracy cannot meet the design requirements

Images