A miniature four-channel circulating flow three-axis silicon jet gyroscope

A four-channel, circulating flow technology, used in steering induction equipment and other directions, can solve the problems of small gas capacity, small airflow speed, and low gyro sensitivity, so as to improve the yield and service life, reduce the difficulty of packaging, and have good long-term stability. Effect
CN105091876BInactive Publication Date: 2018-01-05BEIJING INFORMATION SCI & TECH UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INFORMATION SCI & TECH UNIV
Publication Date
2018-01-05
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The application exposes a miniature four-channel circular flow type triaxial silicon jet gyro; the jet gyro comprises a four-channel circular flow type triaxial angular velocity sensitive element and a PCB, and the sensitive element is electrically connected with the PCB, wherein the sensitive element comprises a PMMA upper cover, an upper silicon board, a lower silicon board, a PMMA bottom cover and a piezoelectric ceramic round oscillator; the piezoelectric ceramic round oscillator is embedded in the PMMA upper cover; the upper silicon board is provided with a jet network; the lower silicon board is provided with a jet network and a hot line; the PMMA upper cover, the upper silicon board, the lower silicon board and the PMMA bottom cover are successively bonded to form the sensitive element. The jet gyro adopts one piezoelectric ceramic round oscillator to drive four-channel circular flow, not only is simple in structure, long in life and low in power consumption, and implements deformation direction of the piezoelectric ceramic round oscillator and direction turning of jet flow network planes; the area of the piezoelectric ceramic round oscillator is large, the driving ability is strong, the jet velocity is high, and the jet gyro sensitivity is high; and angular velocities of three orthogonal directions can be sensitive at the same time, and multi-axis integration is achieved.
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Description

technical field

[0001] The invention belongs to the technical field of using Coriolis force to deflect a jet sensitive body to detect the angular velocity attitude parameters of a moving body, in particular to a miniature four-channel circulation flow type three-axis silicon jet gyroscope. Background technique

[0002] At present, the sensitive elements of micro-gyroscopes represented by micro-mechanical vibrating gyroscopes are composed of vibrating parts with different structures, which are not only easily broken or damaged under slightly high acceleration shocks, but also require vacuum packaging in order to reduce damping during the manufacturing process. Complex, causing fatigue damage when working for a long time. In contrast, jet gyroscopes do not require vibrating parts, have a simple structure, can withstand high overload, long life and low cost, which are incomparable to other gyroscopes, and have a wider range of applications. Chinese patent 89105999.7 proposes a...

Claims

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