High-precision, large-range optical NEMS micro-accelerometer based on monolithic integration

A micro-accelerometer, monolithic integration technology, applied in the direction of measurement of acceleration, velocity/acceleration/shock measurement, measurement device, etc. Effects of small cross-coupling, improved stability and reliability

Active Publication Date: 2016-08-24
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the manufacturing process of the accelerometer is quite complicated, which is not conducive to large-scale manufacturing, and the integration level can continue to be improved.

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  • High-precision, large-range optical NEMS micro-accelerometer based on monolithic integration
  • High-precision, large-range optical NEMS micro-accelerometer based on monolithic integration
  • High-precision, large-range optical NEMS micro-accelerometer based on monolithic integration

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Embodiment Construction

[0023] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings.

[0024] The present invention is based on a single-chip integrated high-precision, large-range optical NEMS micro-accelerometer, which is composed of an acceleration sensitive system and an optical displacement measurement system; a high-sensitivity acceleration sensitive system is produced by a single-chip SOI, such as figure 1 , 2 As shown, the acceleration sensitive system consists of a grating 1 on a single piece of SOI, four cantilever beams 2 and a substrate 3. The SOI is a three-layer structure of Si-SiO2-Si; the cantilever beam 2 is a serpentine beam structure The silicon device layer on the SOI substrate is subjected to electron beam exposure or focused ion beam etching to form a grating 1 and four cantilever beams 2, wherein the grating 1 is located in the center of the acceleration sensitive system, and the four cantilever beams 2 a...

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Abstract

The invention discloses a high-precision, large-range optical NEMS micro-accelerometer based on monolithic integration, which is composed of an acceleration sensitive system and an optical displacement measurement system. The acceleration sensitive system consists of a grating on a monolithic SOI, four cantilever beams and the substrate; the optical displacement measurement system includes a laser, a photodetector, an upper substrate layer, a support and connection part, a processing circuit and a computer; the grating is used as an optical modulation element in the optical displacement measurement system, and as an acceleration sensitive system. The role of the quality block is eliminated; the micro accelerometer of the present invention has utilized the single-chip integrated NEMS acceleration sensing system to realize the linear acceleration sensitivity of a large dynamic range, and has utilized the interference phenomenon of the diffraction grating and the Wood anomaly of the sub-wavelength grating to realize a large High displacement measurement sensitivity, combining the two systems can achieve acceleration measurement with high precision and large dynamic range.

Description

technical field [0001] The invention relates to the field of optical acceleration sensors, in particular to a high-precision, large-range optical NEMS micro-accelerometer based on monolithic integration. Background technique [0002] Accelerometers are sensors that measure the acceleration of objects. As one of the key components of inertial navigation systems, accelerometers are widely used in aerospace, anti-vibration measurement, earthquake monitoring, and transportation. Micro-accelerometer is one of the core devices of micro-inertial navigation system. Compared with traditional accelerometer, it has the advantages of small size, light weight, low cost, low power consumption, high reliability and easy integration. Now, the practical application of the micro-accelerometer has been extended to automatic control, automobile brake start detection, alarm system, various toys, structure and environment monitoring, engineering vibration measurement, geological exploration, vibr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/093
Inventor 卢乾波廉文秀娄树旗白剑
Owner ZHEJIANG UNIV
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