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Eight-beam triaxial acceleration sensor with low inter-axis coupling degree

A technology of inter-axle coupling and axis acceleration, which is applied in the direction of acceleration measurement using inertial force, and can solve the problem of large coupling between axes of eight-beam three-axis acceleration sensors.

Inactive Publication Date: 2017-10-20
ZHONGBEI UNIV
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Problems solved by technology

[0006] The purpose of the present invention is to solve the above-mentioned problem of large inter-axis coupling of the existing piezoresistive eight-beam three-axis acceleration sensor, and provide a sensor for reducing the inter-axis coupling of the eight-beam three-axis acceleration sensor

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  • Eight-beam triaxial acceleration sensor with low inter-axis coupling degree
  • Eight-beam triaxial acceleration sensor with low inter-axis coupling degree
  • Eight-beam triaxial acceleration sensor with low inter-axis coupling degree

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Embodiment Construction

[0099] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0100] An eight-beam three-axis acceleration sensor with low inter-axis coupling, such as figure 1 As shown, the sensor is composed of a sensitive mass 2, a frame 1 and eight rectangular beams 3, two mutually parallel rectangular beams are distributed on each side of the mass block and the frame, and the entire sensor has a symmetrical structure. Specifically, the right side of the sensitive mass 2 is connected to frame 1 through beam L1 and beam L2, its upper side is connected to frame 1 through beam L3 and beam L4, its left side is connected to frame 1 through beam L5 and beam L6, and its lower side is connected to frame 1 through beam L5 and beam L6. Beam L7 and beam L8 are connected to frame 1 .

[0101] The varistors are distributed on the eight rectangular beams as follows, as figure 2 Shown:

[0102] A piezoresistor X4 is provided o...

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Abstract

The invention discloses an eight-beam triaxial acceleration sensor with low inter-axis coupling degree. The acceleration sensor comprises a frame (1). The middle part of the frame is provided with a sensitive mass block (2). Each side of the sensitive mass block (2) is connected with the frame (1) through two parallel rectangular beams (3); the right side of the sensitive mass block (2) is connected with the frame (1) through a beam L1 and a beam L2, the upper side is connected with the frame (1) through a beam L3 and a beam L4, the left side is connected with the frame (1) through a beam L5 and a beam L6, and the lower side is connected with the frame (1) through a beam L7 and a beam L8. According to the acceleration sensor, through reasonably increasing the number of varistors and correctly arranging positions of the varistors, a problem of high inter-axis coupling degree in structure of a beam structure piezoresistive acceleration sensor is settled, and the inter-axis coupling degree of the sensor is effectively reduced.

Description

technical field [0001] The invention relates to a piezoresistive acceleration sensor in the field of MEMS (Microelectric Mechanical Systems) sensors, in particular to an eight-beam three-axis acceleration sensor with low coupling between axes. Background technique [0002] Acceleration sensors are widely used in various fields such as game control, handle vibration and shaking, vehicle brake start detection, earthquake detection, engineering vibration measurement, geological exploration, vibration testing and analysis, and security vibration reconnaissance. [0003] Acceleration sensors are classified into uniaxial acceleration sensors and triaxial acceleration sensors. The three-axis acceleration sensor can be composed of three single-axis acceleration sensors or monolithically integrated. The former has a large volume and low assembly precision, which promotes the development of monolithic integrated triaxial acceleration sensors. The piezoresistive acceleration sensor h...

Claims

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Application Information

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IPC IPC(8): G01P15/12
CPCG01P15/12
Inventor 张文栋宋金龙何常德薛晨阳
Owner ZHONGBEI UNIV