X-ray differential phase contrast microscope system and two-dimensional imaging method thereof

Abstract

The invention discloses an X-ray differential phase contrast microscope system and a two-dimensional imaging method thereof. The X-ray differential phase contrast microscope system comprises a light source, a convergent lens, a center diaphragm, a beam splitting grating, a pin hole, a sample table, an object lens, an annular analysis grating and an imaging detector, wherein the light source is used for generating X rays; the convergent lens, the center diaphragm, the beam splitting grating, the pin hole, the sample table, the object lens, the annular analysis grating and the imaging detector are sequentially arranged in the X-ray spreading direction. The X-ray differential phase contrast microscope system has the beneficial effects that the X-ray differential phase contrast microscope system can realize the phase contrast quantitative imaging only through adding the beam splitting grating and the annular analysis grating in the conventional X-ray microscope; the advantages of simple structure and easy popularization are realized. In addition, the X-ray light source, the convergent lens and the beam splitting grating can be integrated into an X-ray annular grating source element; the length of the whole X-ray phase contrast microscope system can be further reduced; the manufacturing cost of the X-ray microscope system can be reduced; in addition, the light utilization efficiencyis further improved.

Description

technical field [0001] The invention relates to the technical field of nano-resolution X-ray microscope imaging, in particular to an X-ray differential phase contrast microscope system and a two-dimensional imaging method thereof. Background technique [0002] The effect of matter on X-rays can be represented by the refractive index, n=1-δ+iβ, where δ is the attenuation rate of the real part of the refractive index, and β is the absorption term. The physical meaning of δ is that the X-rays passing through a unit length of matter move relative to the wavefront generated by the X-rays passing through a unit length of vacuum; the physical meaning of β is the decrease in the amplitude of X-rays passing through a unit length of matter. According to the physical meaning of δ and β, after the X-ray passes through a sample, its complex amplitude can be expressed as in [0003] [0004] It is the change amount of the X-ray phase passing through the sample relative to the X-ray ...

AI Technical Summary

Problems solved by technology

However, the phase contrast imaging invented by Zernike has obvious shortcomings: its application range is limited to weak phase samples with negligible absorption

These deficiencies make it difficult to quantitatively study the density structure of samples

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