Device for detecting mechanical decoupling pressure

The thermal expansion stress is isolated through a mechanical decoupling structure, which solves the impact of temperature changes on the accuracy of the pressure detection device and achieves more accurate pressure measurement.

Active Publication Date: 2018-02-23
SAFRAN ELECTRONICS & DEFENSE (FR)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] A disadvantage of this device in general is that its accuracy depends on temperature and its variation
[0005] In fact, since the membrane and the substrate are usually made of different materials, changes in temperature lead to different expansions in the device, which lead to stresses that affect the deformation of the membrane and thus bias the pressure measurement

Method used

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Examples

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Embodiment Construction

[0019] Referring to the drawings, the pressure detection device comprises a base 1 to which a pressure sensor, generally bearing the reference numeral 2, is attached. The pressure sensor 2 comprises a membrane 3 having a surface 4 for receiving a pressurized fluid and arranged to deform elastically depending on the pressure. The pressure sensor 2 also comprises means for determining the deformation of the membrane 3 along an axis 5 perpendicular to the median plane of the membrane 3 at rest.

[0020] According to the invention, the membrane 3 is supported by a frame 6 made of the same material as the membrane 3 . The frame 6 is supported by a mechanical decoupling structure, generally designated 7 , connected to the base 1 and arranged to isolate the membrane 3 from stresses caused by differential thermal expansion between the frame 6 and the base 1 .

[0021] according to Figures 1 to 3 In the first embodiment shown, the decoupling structure 7 comprises a plate 8 integral ...

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Abstract

The invention discloses a device for detecting mechanical decoupling pressure. The invention relates to a pressure detection device including a mount on which is attached a pressure sensor comprisinga diaphragm which has a surface intended to be subjected to a pressurized fluid and is arranged to elastically deform according to the pressure, and means for determining the deformation of the diaphragm along an axis normal to a mid-plane of the diaphragm in the rest state. The diaphragm is supported by a frame connected to the mount by a mechanical decoupling structure to isolate the diaphragm from forces resulting from differential thermal expansion between the frame and the mount, the diaphragm and the frame being made of the same material.

Description

technical field [0001] The invention relates to the field of pressure measurement, in particular to the field of aviation. Background technique [0002] The pressure detection device includes a base to which the pressure sensor is attached. The pressure sensor includes a substrate supporting a first electrode and a membrane supporting a second electrode opposite the first electrode. The membrane is subjected to the pressure of the fluid to be measured, and is easily deformed under such pressure, so that the distance between the electrodes, measured along an axis perpendicular to the electrodes, varies according to the pressure. When they are subjected to a voltage, the two electrodes thus form a capacitor, the capacitance of which varies depending on the pressure, wherein the measurement of this capacitance enables the determination of the pressure. [0003] For example, other devices including other means for measuring membrane deformation also exist, such as strain gauge...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): G01L7/08G01L19/06G01L19/14
CPCG01L7/082G01L19/0681G01L19/146G01L19/147
OwnerSAFRAN ELECTRONICS & DEFENSE (FR)