Cantilever probe card

A cantilever probe card, a flexible technology, used in measurement devices, instruments, measurement electronics, etc., can solve the problem that Needle cannot achieve impedance control, the speed limit of the cantilever probe card, and the large signal return loss and insertion loss, etc. problems, to achieve the effect of controllability, good electrical interconnection, and controllable impedance

Pending Publication Date: 2018-10-26
上海泽丰半导体科技有限公司
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The rate of the current cantilever probe card is limited, and its bottleneck is in the Needle, mainly because the Needle cannot achieve good impedance control, which makes the return loss of the signal on the path from the printed circuit board to the wafer. The insertion loss and insertion loss are very large, and the signal attenuation is serious, which makes the signal propagation distorted

Method used

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Embodiment Construction

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation manners of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention, and those skilled in the art can obtain other accompanying drawings based on these drawings and obtain other implementations.

[0030] In order to make the drawing concise, the parts related to the present invention are only schematically shown in each drawing, and they do not represent the actual structure of the product.

[0031] Such as figure 2 as shown, figure 2 The cantilever type probe card of an embodiment is shown, comprising: a printed circuit board 1 and a flexible circuit board 4, the printed circuit board 1 and the flexible circuit board 4 are electrically interconnected, and the printed ci...

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Abstract

The invention discloses a cantilever probe card, which comprises a printed circuit board and a flexible printed circuit board. The printed circuit board and the flexible printed circuit board are in electrical connection, and the printed circuit board is electrically connected with projections on a wafer through the flexible printed circuit board. By adoption of the flexible printed circuit board,the printed circuit board on the probe card is electrically connected with the projections on the wafer, signal transmission rate can be effectively increased, and communication impedance controllability can be realized.

Description

technical field [0001] The invention relates to the field of chip testing, in particular to a cantilever probe card. Background technique [0002] In the chip production process, it is necessary to ensure that the functions of the chip meet the design requirements through testing means. The chip test can be divided into two types of tests, the first type is the test before wafer packaging, and the second type is the test after wafer packaging. Among them, the first type of test requires the use of probe cards for testing. Probe cards can be further divided into vertical probe cards and cantilever probe cards. The probe cards mentioned in the present invention are cantilever probe cards. [0003] Such as figure 1 As shown, the current relatively mature cantilever probe card test scheme is described as follows: In wafer testing, a printed circuit board needs to be used as a carrier board, a needle line (Needle) and a part of the needle fixed reinforcement structure. One sid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/067G01R1/073G01R1/04
CPCG01R1/0416G01R1/06727G01R1/073
Inventor 梁建罗雄科
Owner 上海泽丰半导体科技有限公司
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