Desktop-type soft X-ray band optical element polarization detection device

Abstract

The invention relates to a desktop-type soft X-ray band optical element polarization detection device. The desktop-type soft X-ray band optical element polarization detection device comprises a soft X-ray light source assembly, a soft X-ray polarizing chamber assembly, a 360-degree rotating assembly, a vacuum assembly, a slit assembly, a soft X-ray light intensity monitoring assembly, a sample chamber assembly and a detection assembly. Through the design of a compact structure, a fixing mode and a linear polarization soft X-ray light intensity monitoring mechanism, a soft X-ray optical elementpolarization detection platform which is adjustable in the linear polarization direction within the 360 degrees is constructed. Compared with the prior art, the desktop-type soft X-ray band optical element polarization detection device has the advantages of being simple and compact in structure, convenient to mount and debug, high in precision and the like, and is suitable for carrying out optical element soft X-ray polarization characteristic detection in a laboratory.

Description

technical field [0001] The invention relates to the field of polarization characteristic detection of optical elements, in particular to a desktop polarization detection device for optical elements in the soft X-ray band. Background technique [0002] At present, the detection of the polarization characteristics of multilayer film mirrors applied in the soft X-ray band usually needs to be carried out at the synchrotron radiation source. The waiting period for the test is long and the actual test time is short. A lot of inconvenience has come, which has seriously affected the progress and efficiency of mirror research and development. In order to improve the research and development efficiency of mirrors and shorten the research and development cycle, it is of great application value to develop a desktop soft X-ray polarization detection platform under laboratory conditions. [0003] In my country, at present, the detection of the polarization characteristics of multilayer f...

AI Technical Summary

Problems solved by technology

The device has four deficiencies: first, the device lacks an on-line monitoring component for linearly polarized soft X-ray light intensity, so the reliability of the measurement results of the polarization characteristics of the optical element is poor, and the absolute reflectivity cannot be obtained; second, the starting point of the device is The polarized reflector is fixed on the helical linear introducer, so the reflector is not fixed stably, resulting in poor light intensity stability and collimation during rotation; third, the soft X-ray light source and the multilayer reflector of the device can only The rotation range of 180° is realized, and the polarization direction of linearly polarized soft X-rays varies from -40° to 140°; Fourth, the device is bulky, with a length of 17m, and the construction and operation costs are huge.

In addition, the intensity of linearly polarized X-rays incident on the sample is not stable

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