Desktop-type soft X-ray band optical element polarization detection device

A technology of optical components and detection devices, which is applied in the direction of measuring devices, scattering characteristics measurement, and testing optical properties, etc., can solve the problems of light intensity stability, poor collimation, poor reliability, and large volume, so as to improve measurement accuracy, Easy installation and debugging, and the effect of reducing the peripheral size

CN108918095AActive Publication Date: 2018-11-30TONGJI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2018-11-30

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Abstract

The invention relates to a desktop-type soft X-ray band optical element polarization detection device. The desktop-type soft X-ray band optical element polarization detection device comprises a soft X-ray light source assembly, a soft X-ray polarizing chamber assembly, a 360-degree rotating assembly, a vacuum assembly, a slit assembly, a soft X-ray light intensity monitoring assembly, a sample chamber assembly and a detection assembly. Through the design of a compact structure, a fixing mode and a linear polarization soft X-ray light intensity monitoring mechanism, a soft X-ray optical elementpolarization detection platform which is adjustable in the linear polarization direction within the 360 degrees is constructed. Compared with the prior art, the desktop-type soft X-ray band optical element polarization detection device has the advantages of being simple and compact in structure, convenient to mount and debug, high in precision and the like, and is suitable for carrying out optical element soft X-ray polarization characteristic detection in a laboratory.
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Description

technical field

[0001] The invention relates to the field of polarization characteristic detection of optical elements, in particular to a desktop polarization detection device for optical elements in the soft X-ray band. Background technique

[0002] At present, the detection of the polarization characteristics of multilayer film mirrors applied in the soft X-ray band usually needs to be carried out at the synchrotron radiation source. The waiting period for the test is long and the actual test time is short. A lot of inconvenience has come, which has seriously affected the progress and efficiency of mirror research and development. In order to improve the research and development efficiency of mirrors and shorten the research and development cycle, it is of great application value to develop a desktop soft X-ray polarization detection platform under laboratory conditions.

[0003] In my country, at present, the detection of the polarization characteristics of multilayer f...

Examples

Embodiment Construction

[0042] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. This embodiment is carried out on the premise of the technical solution of the present invention, and detailed implementation and specific operation process are given, but the protection scope of the present invention is not limited to the following embodiments.

[0043] Such as figure 1 with figure 2 As shown, this embodiment provides a desktop type soft X-ray optical element polarization detection device, including a soft X-ray light source assembly 1, a soft X-ray polarization chamber assembly 2, a 360° rotation assembly 3, a vacuum assembly 4, a narrow Slit assembly 5, soft X-ray light intensity monitoring assembly 6, sample chamber assembly 7 and detection assembly 8, wherein, soft X-ray light source assembly 1 is used to generate soft X-ray beam; soft X-ray polarizing chamber assembly 2 and soft The X-ray light source assembly 1 is con...