Magnetorheological fluid grinding and polishing method controlled by alternating electromagnetic field

Abstract

The invention discloses a novel magnetorheological fluid grinding and polishing method based on alternating electromagnetic field control. A workpiece is placed between two electromagnetic control discs, the two electromagnetic control discs generate an alternating electromagnetic field through alternating current, the alternating electromagnetic field controls a magnetic brush formed by the magnetorheological fluid to move to achieve grinding, and the grinding speed and the grinding force are adjusted by the frequency and voltage of a power source. The magnetorheological fluid grinding and polishing method controlled by the alternating electromagnetic field has the outstanding advantages that no moving mechanical structure exists in the grinding process, and the grinding speed and the grinding force are conveniently adjusted.

Description

technical field [0001] The invention belongs to the technical field of precision machining, and in particular relates to a double-sided grinding and polishing method using an alternating electromagnetic field to control a magnetorheological fluid. Background technique [0002] With the development of chip manufacturing technology and optoelectronic technology, the requirements for surface grinding and polishing of semiconductor wafers and optical glass are getting higher and higher. Both wafer and glass are hard and brittle materials, and traditional grinding and polishing methods are difficult to meet their production requirements. Magnetorheological fluid grinding is an effective grinding and polishing method for hard and brittle materials. [0003] The magnetorheological fluid grinding is to use the magnetorheological fluid to become a solid-like under the action of a magnetic field, and the solid-like restrains the relative movement of the abrasive particles and the work...

AI Technical Summary

Problems solved by technology

[0005] The disadvantages of existing magnetorheological grinding and polishing methods and equipment: the grinding speed is mainly adjusted by the running speed of the grinding head spindle motor, the mechanical transmission structure is complex, and the inertia of the equipment at high speed can easily cause vibration and noise; during the grinding process, the magnetic field strength and The position of the abrasive grains whose direction is fixed and constrained basically remains unchanged. If these abrasive grains are worn out during the grinding process, if they are not replaced in time, the grinding efficiency will decrease; it is inconvenient to adjust the grinding force and the magnetic field of the magnetorheological fluid, etc.

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