High-precision micro-nano three-dimensional measurement method based on time-domain phase shift algorithm
A three-dimensional measurement, high-precision technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of low efficiency and inability to measure violent objects, and achieve high efficiency, fast speed and wide application
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[0024] In order to make the objectives, technical solutions and advantages of the present invention clearer, the following will further describe the present invention in detail with reference to specific examples and drawings.
[0025] The optical path diagram of the measurement system used in the high-precision micro-nano three-dimensional measurement method based on the time-domain phase shift algorithm of the present invention is as follows figure 1 As shown, the white light source 1 is used to illuminate the digital micro-mirror array (DMD) 3 after passing through the collimating beam expander 2, and the light beam illuminates the surface of the object 9 to be measured through the tube lens 4, the beam splitter 5 and the microscope lens 8. The mirror array (DMD) is located at the focal plane of tube lens 1, and the light path passes through tube lens 6 after being reflected on the surface of the object. The CCD acquisition system 7 collects the fringe pattern carrying object he...
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