High-precision micro-nano three-dimensional measurement method based on time-domain phase shift algorithm

A three-dimensional measurement, high-precision technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of low efficiency and inability to measure violent objects, and achieve high efficiency, fast speed and wide application

Active Publication Date: 2019-04-09
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The accuracy of traditional optical measurement methods has reached the nanometer level. For example, the laser confocal method uses point detectors to measure objects point

Method used

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  • High-precision micro-nano three-dimensional measurement method based on time-domain phase shift algorithm
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  • High-precision micro-nano three-dimensional measurement method based on time-domain phase shift algorithm

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[0024] In order to make the objectives, technical solutions and advantages of the present invention clearer, the following will further describe the present invention in detail with reference to specific examples and drawings.

[0025] The optical path diagram of the measurement system used in the high-precision micro-nano three-dimensional measurement method based on the time-domain phase shift algorithm of the present invention is as follows figure 1 As shown, the white light source 1 is used to illuminate the digital micro-mirror array (DMD) 3 after passing through the collimating beam expander 2, and the light beam illuminates the surface of the object 9 to be measured through the tube lens 4, the beam splitter 5 and the microscope lens 8. The mirror array (DMD) is located at the focal plane of tube lens 1, and the light path passes through tube lens 6 after being reflected on the surface of the object. The CCD acquisition system 7 collects the fringe pattern carrying object he...

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Abstract

The invention discloses a high-precision micro-nano three-dimensional measurement method based on a time-domain phase shift algorithm. According to the phase-shifted fringe projected on each moving object in the longitudinal direction, the scanning times correspond to the projected fringe patterns with a certain phase difference one by one, a CCD collects the fringe patterns carrying the object height information synchronously, and then the object height information is extracted to recover the three-dimensional shape of the object through the corresponding algorithm. In the measurement, the phase-shifted fringe patterns precoded by a computer are projected onto the surface of an object synchronously with the longitudinal movement of a PZT scanning stage, the CCD captures a series of imagedpictures, the light intensity value of each pixel point in each picture is longitudinally extracted to draw a light intensity curve, the envelope is extracted for the light intensity curve, to obtainan imaging fringe pattern modulation curve, the peak position of the modulation curve corresponds to the rough position of the pixel point focus, the Gaussian curve fitting is performed on adjacent points of the position, to obtain the accurate focus position, and then the three-dimensional shape of the object is restored. The method has the characteristics of non-contact, fastness, high-precision and the like.

Description

Technical field [0001] The invention belongs to the technical field of optical measurement engineering, and specifically relates to a high-precision micro-nano three-dimensional measurement method based on a time-domain phase shift algorithm. Background technique [0002] In recent years, under the rapid development and strong promotion of emerging technologies, the continuous development and progress of ultra-precision processing technology, as well as the manufacturing and development of micro-electromechanical systems, micro-optical components and other microstructures, the high precision and measurement of microstructure surface topography Requirements such as high reliability are increasing day by day. The surface topography not only affects the mechanical and physical properties of the contact parts, but also affects the properties of non-contact surfaces, such as the reflection of optical devices. The measurement of the structure is a prerequisite and quality assurance fo...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 刘磊唐燕谢仲业位浩杰赵立新胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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