Laser-induced PVD equipment with circuit protection function

A circuit protection, laser-induced technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of shaking, equipment damage, unsatisfactory firmness, etc., to achieve convenient replacement, protection and safety , the effect of increasing practicality

Inactive Publication Date: 2019-05-10
厦门市万久物联技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a laser-induced PVD device with a circuit protection function, which solves the problem that the existing PVD device hanger will shake when used, and the firmness is not ideal, which may easily cause damage to the device

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  • Laser-induced PVD equipment with circuit protection function
  • Laser-induced PVD equipment with circuit protection function
  • Laser-induced PVD equipment with circuit protection function

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Embodiment Construction

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0040] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or Elements must have certain orie...

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Abstract

The invention discloses laser-induced PVD equipment with a circuit protection function, and relates to the technical field of PVD equipment. The laser-induced PVD equipment with the circuit protectionfunction comprises a fixed chuck; the top of the fixed chuck is movably connected with the outer side of a clamping joint; the top of the fixed chuck is fixedly connected with the bottom of a protection member; the bottom of the fixed chuck is movably connected with the outer side of a boom; and one ends of the two sides of the boom are provided with grooves correspondingly. According to the laser-induced PVD equipment with the circuit protection function, the stability of the PVD equipment is ensured through the fixed chuck, the height of the PVD equipment can be adjusted conveniently, the fixed chuck is convenient to replace through connection between a threaded plate and a threaded cylinder, PVD equipment of different specifications can be hoisted conveniently, falling force generatedduring hoisting of the PVD equipment can be reduced through a rubber rod, the safety of the PVD equipment is ensured, the stability of the boom is strengthened through a limiting rod, and the safety of PVD equipment circuits can be effectively protected through an undervoltage protection module.

Description

technical field [0001] The invention relates to the technical field of PVD equipment, in particular to a laser-induced PVD equipment with circuit protection function. Background technique [0002] Physical vapor deposition (PVD) refers to the process of transferring atoms or molecules from the sputtering cathode or evaporation source to the surface of the substrate by using physical processes. When the current PVD equipment is hoisted by ordinary lifting lugs, due to The structural design of ordinary spreaders is unreasonable, and PVD equipment is easily damaged during the lifting process, and ordinary spreaders are limited by the height of the factory building. [0003] The special spreader for CVD / PVD equipment disclosed in the Chinese Invention Patent Application Publication No. CN206345599U, the special spreader for CVD / PVD equipment solves the problem of lifting CVD and PVD equipment in the current market. The overall structure design is reasonable and can be used in di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/54
Inventor 邹朝圣廖亚琳林荣川马肃霜
Owner 厦门市万久物联技术有限公司
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