A high-precision optical accelerometer with self-adjusting function

Abstract

The invention discloses a high-precision accelerometer with a self-zeroing function. The accelerometer is formed by vibration picking units and a sensing unit. The vibration picking units are arrangedto be a vertical elastic support in a string mode through at least two pieces of beryllium copper reeds and by using a central fixing plate and an outer ring pressing ring, and are fixedly installedon an annular top cover by using the outer ring pressing ring. A mass block is fixedly arranged at a center position of a lower surface of a bottom beryllium copper reed, and a first plane reflectionmirror is arranged at a bottom surface of the mass block. Emitted light of a laser in the sensing unit is successively reflected by a second plane reflection mirror and the first plane reflection mirror, and then is emitted into a photosensitive surface of a CMOS sensor. An output signal of the CMOS sensor is taken as a detection output signal of the accelerometer. In the invention, low frequencyvibration detection with high sensitivity can be realized, and the accelerometer has advantages of convenient adjustment, low cost, good adaptability and the like.

Description

technical field [0001] The invention relates to the field of vibration detection, in particular to a high-precision optical accelerometer with self-zeroing function which can be applied to micro vibration detection. Background technique [0002] Precision measuring instruments, including micro-nano coordinate measuring machines, atomic force microscopes, and high-precision laser interferometers, will be affected by external interference during work, and micro vibration is one of the main interference factors. For example, small vibrations caused by a car passing by on the road, someone walking by, sound, etc. will interfere with the use of precision instruments. Therefore, it is necessary to develop a high-precision micro-vibration measurement system to achieve active vibration isolation. The resolution of the amplitude detected by the system needs to reach the micron level, and it can perform real-time high-precision measurement. [0003] Accelerometers in the prior art, s...

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Problems solved by technology

[0003] Accelerometers in the prior art, such as PZT accelerometers, have low sensitivity and are generally at the level of mV / g; strain-type accelerometers are not suitable for precise measurement due to temperature drift; the detection accuracy of FBG accelerometers depends on their The accuracy of modulation and demodulation requires high cost to achieve high precision; MEMS accelerometer needs to adopt micro-processing technology, which has high processing cost, and the output signal of MEMS accelerometer is weak

These accelerometers cannot meet the needs of the detection of small vibrations

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