Nano indentation area measuring device

Abstract

The invention discloses a nano-indentation area measurement device and belongs to the technical field of optical and mechanical precise measurement. The device is mainly composed of a control system module, an optical system module, a signal demodulation module and a data processing module. The optical system module is mainly composed of a light source, a scattering measurement optical component and a scattering measurement receiving device. According to the device, laser with stable power output is taken as a measurement light source; light beams pass a beam splitter prism, enter into a converging object lens and are gathered on a nano-indentation indenter; and a power of the laser light source is regulated and controlled, scattering light pass the converging object lens and the beam splitter prism, measurement light electric signals are obtained at the measurement receiving device, a space between the nano-indentation indenter and a measured object, and an area are processed according to the signals, and a nano-indentation area is determined through utilization of a scattering light power and a light spot range. The nano-indentation area measurement accuracy is improved, and relatively high measurement object adaptability is achieved.

Description

technical field [0001] The invention relates to a nano-indentation area measuring device, which belongs to the technical field of optical and mechanical precision measurement. Background technique [0002] The nanoindentation method to measure the mechanical properties of materials is widely used in technical fields such as physics, material science and chemistry, and the measurement technology involved is also continuously improved according to the growing needs. As an important means of high-precision measurement of the mechanical properties of materials, the improvement of measurement methods and accuracy related to nano-indentation is of great significance. In the nanoindentation method, due to the small depth and complex structure of the indentation, the measurement results of the nanoindentation area have large errors, and random, systematic and gross errors are difficult to determine and separate, especially when the measured size of the structure is several nanometer...

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