Circularly polarized light polarization state detector based on film bulk acoustic resonator
A thin-film bulk acoustic wave, circularly polarized light technology, applied in electrical components, impedance networks, etc., can solve problems such as the inability of photothermal detectors to detect
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Embodiment 1
[0021] This embodiment provides a Figure 1 ~ Figure 2 The shown polarization state detector based on the circularly polarized light of the film bulk acoustic resonator includes a substrate layer 1, which mainly plays a supporting role, and the substrate layer 1 is made of silicon dioxide; The top of the bottom layer 1 is provided with a first electrode layer 2, the top of the first electrode layer 2 is provided with a piezoelectric film layer 3; the piezoelectric film layer 3 is provided with a second electrode layer 4, the first electrode layer 2, The piezoelectric film layer 3 and the second electrode layer 4 together form a film bulk acoustic resonator, and a chiral structure array 5 is arranged above the second electrode layer 4; the chiral structure array 5 absorbs circularly polarized light of different polarization states Different, so the change of the resonant wavelength of the thin film bulk acoustic resonator is different, and the detection of the polarization stat...
Embodiment 2
[0026] This embodiment provides a figure 1 , image 3 The shown polarization state detector based on the circularly polarized light of the film bulk acoustic resonator includes a substrate layer 1, which mainly plays a supporting role, and the substrate layer 1 is made of silicon dioxide; The top of the bottom layer 1 is provided with a first electrode layer 2, the top of the first electrode layer 2 is provided with a piezoelectric film layer 3; the piezoelectric film layer 3 is provided with a second electrode layer 4, the first electrode layer 2, The piezoelectric film layer 3 and the second electrode layer 4 together form a film bulk acoustic resonator, and a chiral structure array 5 is arranged above the second electrode layer 4; the chiral structure array 5 absorbs circularly polarized light of different polarization states Different, so the change of the resonant wavelength of the thin film bulk acoustic resonator is different, and the detection of the polarization stat...
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