Electrochemical gas sensor and device packaging method thereof

A gas sensor, electrochemical technology, applied in the direction of scientific instruments, instruments, measuring devices, etc., can solve the problems of low electrochemical reaction sensitivity, unfavorable miniaturization of the overall device, unstable sensor data, etc., to increase the electrode reaction area, process Low cost, less volatilization and deterioration effect
CN110455899AInactive Publication Date: 2019-11-15广州钰芯传感科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
广州钰芯传感科技有限公司
Publication Date
2019-11-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to an electrochemical gas sensor and a device packaging method thereof. The electrochemical gas sensor comprises an upper cover plate, an electrode plate and a substrate; the upper cover plate adopts a porous ceramic material, and to-be-measured gas can enter the sensor through ceramic micro pores; the back surface of the electrode plate is equipped with a micro-spacing sensor electrode of a three-electrode coplanar system, wherein the electrode is covered with a solid electrolyte layer and is sealed in a groove of the substrate; and the electrode plate is coupled to thesubstrate through an adhesive and is electrically connected with the substrate through gold wire binding. The sensor is less in components, small in size, high in sensitivity and long in service life.
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Description

technical field

[0001] The invention relates to the field of gas detection instruments, in particular to an electrochemical gas sensor and a device packaging method thereof. Background technique

[0002] With the development of sensing technology, gas sensors have been widely used in petrochemical, industrial production, medical, aviation and household life and other fields. With the development of Internet of Things technology, the application requirements of gas sensors are also increasing, especially the gas sensors with small size, low cost, high sensitivity and long life have urgent application requirements. However, gas sensor manufacturing and packaging technologies, such as semiconductor sensors based on ceramic tube heating and shell packaging technology, have been difficult to meet the application requirements of the Internet of Things in terms of size, cost, performance, and lifespan.

[0003] In recent years, gas sensors based on electrochemical technology have ...

Claims

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