Electrochemical gas sensor and device packaging method thereof

Abstract

The invention relates to an electrochemical gas sensor and a device packaging method thereof. The electrochemical gas sensor comprises an upper cover plate, an electrode plate and a substrate; the upper cover plate adopts a porous ceramic material, and to-be-measured gas can enter the sensor through ceramic micro pores; the back surface of the electrode plate is equipped with a micro-spacing sensor electrode of a three-electrode coplanar system, wherein the electrode is covered with a solid electrolyte layer and is sealed in a groove of the substrate; and the electrode plate is coupled to thesubstrate through an adhesive and is electrically connected with the substrate through gold wire binding. The sensor is less in components, small in size, high in sensitivity and long in service life.

Description

technical field [0001] The invention relates to the field of gas detection instruments, in particular to an electrochemical gas sensor and a device packaging method thereof. Background technique [0002] With the development of sensing technology, gas sensors have been widely used in petrochemical, industrial production, medical, aviation and household life and other fields. With the development of Internet of Things technology, the application requirements of gas sensors are also increasing, especially the gas sensors with small size, low cost, high sensitivity and long life have urgent application requirements. However, gas sensor manufacturing and packaging technologies, such as semiconductor sensors based on ceramic tube heating and shell packaging technology, have been difficult to meet the application requirements of the Internet of Things in terms of size, cost, performance, and lifespan. [0003] In recent years, gas sensors based on electrochemical technology have ...

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Problems solved by technology

[0005] (1) There are many components and the assembly process is complicated, which is not conducive to the miniaturization of the overall device, and the packaging cost is high;

[0006] (2) The electrolyte is exposed to ambient gas, which is easy to volatilize and age, resulting in unstable sensor data and short life;

[0007] (3) The distance between the working electrode and the counter electrode is relatively long, the effective area is small, and the sensitivity of the electrochemical reaction is low

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