The utility model relates to
tail gas treatment technical field, concretely points to a kind of gas purification equipment applied to
semiconductor packaging;Including host computer, the host computer is equipped with purification tank, fan, air inlet
pipe and
exhaust pipe, the air inlet
pipe, purification tank,
exhaust pipe and fan are connected in proper order,
ionization component is equipped in purification tank, air inlet
pipe and purification tank are equipped with electric heater, air inlet pipe is equipped with
wind speed sensor;First
recovery tank is equipped on the purification tank, second
recovery tank is equipped on
exhaust pipe, and the
discharge port of fan is connected with end processor;It further includes controller, and the controller is connected
ionization component, electric heater, fan and
wind speed sensor respectively by circuit;The utility model structure is reasonable, and
electric heating device makes the temperature in air inlet pipe and purification tank maintain above
rosin melting point, and
ionization device can effectively remove
rosin component in
waste gas;Controller maintains flow balance according to the
wind speed in air inlet pipe and purification tank, and with packaging equipment, packaging quality is improved.