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A kind of self-driving, micro area, positioning ion intercalation and patterning method
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A self-driven, patterned technology, applied in chemical instruments and methods, molybdenum sulfide, inorganic chemistry, etc., can solve problems such as expensive, unrealizable, and complicated methods
Active Publication Date: 2022-07-12
JINAN UNIVERSITY
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Problems solved by technology
However, the electrochemical method needs to first fabricate microelectrodes on the material through microfabrication processes, supplemented by reference electrodes, external bias settings, and ion-conducting liquid / solid electrolytes, which is complex, expensive, and time-consuming.
If ion intercalation is further applied to the fabrication of complex semiconductor heterostructure devices and device integration, positioning intercalation and patterning will be essential processes, and none of the above methods can achieve this requirement
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Embodiment 1
[0048] The present embodiment discloses a process for realizing patterning of Co ion positioning intercalation molybdenum oxide nanosheets, including the following steps:
[0049] S1. Preparation of MoO 3 Nanosheets and single crystals:
[0050] 0.3 g of molybdenum oxide powder was weighed into a crucible and placed in a tube furnace, and the substrate was placed about 12 cm from the powder source. Under the atmospheric environment, the tube furnace is heated to 750-780°C, preferably 780°C, the heating rate is 50°C / min, the temperature is kept constant for 60-120min, the temperature is naturally cooled, and the molybdenum oxide single crystal is deposited on the tube wall. And the substrate can find molybdenum oxide nanosheets with a width of 10-20 μm.
[0051] S2. Electrochemically etched zinc wire:
[0052] Measure 10ml of HCl solution with a concentration of 37%, add 40ml of deionized water for dilution, select a zinc wire with a diameter of 300μm, as shown in Figure 1(a...
Embodiment 2
[0059] The present embodiment discloses a process for realizing patterning of Cu ion positioning intercalation molybdenum oxide nanosheets, including the following steps:
[0060] S1. Preparation of MoO 3 Nanosheets and single crystals;
[0061] S2, electrochemical etching zinc wire;
[0062] The specific implementation process of steps S1 and S2 is the same as that in Embodiment 1;
[0063] S3. Preparation of copper nitrate solution: take 0.01 g of copper nitrate powder, add 60 ml of deionized water, ultrasonically vibrate for 5-10 min, and drop the solution on the surface of the substrate.
[0064] S4. Realize positioning intercalation:
[0065] The specific implementation process of step S4 is the same as that of the first embodiment.
Embodiment 3
[0067] This embodiment discloses a Co ion positioning intercalation MoS 2 The patterning process of nanosheets includes the following steps:
[0068] S1. Preparation of MoS 2 Nanosheets:
[0069] Using dual source heating to grow MoS 2 For nanosheets, 0.3 g of molybdenum oxide powder was weighed into a crucible and placed in a tube furnace, 0.1 g of sulfur powder was placed at a distance of 15 cm from the powder source, and a substrate was placed at a distance of 12 cm from the other end of the powder source. Pass 100sccm of argon gas, the sulfur powder source is heated to 150 °C, the molybdenum oxide source is heated to 760 °C, the heating rate is 50 °C / min, the temperature is kept for 1 h, and the temperature is naturally cooled. MoS with a width of 10-30 μm can be found on the substrate. 2 Nanosheets.
[0070] S2, electrochemical etching zinc wire;
[0071] S3, prepare metal salt solution;
[0072] S4, realizing positioning intercalation.
[0073] The specific implem...
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Abstract
The invention discloses a self-driving, micro-area, positioning ion intercalation and patterning method. The method comprises the following steps: selecting a high-purity metal wire with negative electrochemical potential, and using electrochemical etching to obtain a metal wire with a certain radius of curvature The tip, prepare a certain concentration of metal salt solution and drop it on the surface of the two-dimensional material, fix the etched metal wire on a high-precision three-dimensional control platform, move the metal wire through the control platform, and make the tip of the metal wire with the help of an optical microscope. In contact with the surface of the material, the intercalation reaction starts at the contact site. Through this reaction, the performance of the material is optimized, including broadening the response spectrum range and realizing local functionalization. At the same time, the metal wire is controlled to move on the material surface according to the set pattern, which can A positioning intercalation pattern is obtained, which cannot be achieved by the existing intercalation technology. The present invention achieves remarkable effects in regulating the properties of two-dimensional materials and realizing high-resolution patterning at the nanometer scale.
Description
technical field [0001] The invention relates to the technical field of semiconductor optoelectronic materials, in particular to a method for realizing positioning, intercalation and patterning of ion micro-regions by self-driving. Background technique [0002] Ion intercalation is a powerful technical method to tune the physicochemical properties of 2D materials. At present, ion intercalation can be achieved by introducing gas phase or molten ions during the growth of 2D materials. This method can prepare materials in large quantities, but it is difficult to precisely control intercalation, especially in-situ intercalation cannot be achieved in materials. . Another intercalation method is chemical post-intercalation with zero-valent metals. This method can achieve reversible and non-destructive intercalation, but the metastable precursor used for intercalation is unstable, which severely limits the types and scalability of intercalation. Electrochemical intercalation is a...
Claims
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