A kind of superconducting film and preparation method thereof
A superconducting thin film and mask technology, which is applied in the usage of superconductor elements, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of large difference in quality factor of superconducting waveguides, and achieve the effect of high quality factor
Active Publication Date: 2022-06-03
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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[0004] The embodiment of the present invention provides a superconducting thin film and a preparation method thereof, so as to solve the problem that the quality factors of different positions of the superconducting waveguide prepared by the existing superconducting thin film have large differences
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[0029] S101, providing a substrate.
[0030] S102, forming an etching protection layer on the substrate, and forming a mask pattern on the etching protection layer.
[0033] Optionally, the material of the superconducting thin film layer can be titanium nitride; the material of the substrate can be high-resistance silicon. in high-resistance silicon
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Abstract
The invention discloses a superconducting thin film and a preparation method thereof, wherein, the preparation method of the superconducting thin film comprises: providing a substrate; forming an etching protection layer on the substrate, and forming an etching protection layer on the etching protection layer Mask pattern; using the etching protection layer as a mask, depositing a superconducting film layer on the side of the substrate close to the etching protection layer, the superconducting film layer includes a patterned structure, and the pattern The structure is consistent with the mask pattern. The invention provides a superconducting thin film and a preparation method thereof, in order to solve the problem that the quality factors of superconducting waveguides prepared from the existing superconducting thin film are greatly different at different positions.
Description
A kind of superconducting film and preparation method thereof technical field [0001] The present invention relates to the technical field of superconducting quantum chips, in particular to a superconducting thin film and a preparation method thereof. Background technique With the wide application of modern electronic computers, classical electronic computers are used in large-scale data processing, especially quantitative There are limitations in storage space and speed in fields such as sub-simulation, coupled with the limitations of Moore's Law, scientists propose to use quantum effects for information processing and quantum computing. In the early 1980s, scientists such as Richard Feynman proposed to use Quantum principles make quantum computers and use them to simulate quantum mechanical systems. Then theoretical physicists and computer scientists It has been theoretically confirmed that quantum computers have far superior to classical in quantum simulation, qu...
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IPC IPC(8): H01L21/3205H01L21/322
CPCH01L21/3205H01L21/322Y02E40/60
Inventor 冯加贵熊康林丁孙安武彪孙骏逸黄永丹陆晓鸣芮芳
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI