Superconducting film and preparation method thereof
A superconducting thin film and mask technology, which is applied in the usage of superconductor elements, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of large difference in quality factor of superconducting waveguides, and achieve the effect of high quality factor
Active Publication Date: 2019-12-03
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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[0004] The embodiment of the present invention provides a superconducting thin film and a preparation method thereof, so as to solve the problem that the quality factors of different positions of the superconducting waveguide prepared by the existing superconducting thin film have large differences
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[0028] The embodiment of the present invention provides a method for preparing a superconducting thin film, such as figure 1 as shown, figure 1 It is a schematic flow chart of a method for preparing a superconducting thin film provided in an embodiment of the present invention. The steps of the method for preparing a superconducting thin film are as follows:
[0029] S101, providing a substrate.
[0030] S102, forming an etching protection layer on the substrate, and forming a mask pattern on the etching protection layer.
[0031] S103. Using the etching protection layer as a mask, deposit a superconducting thin film layer on a side of the substrate close to the etching protection layer. The superconducting thin film layer includes a patterned structure, and the patterned structure is consistent with the pattern of the mask.
[0032] Before depositing the superconducting thin film layer on the substrate, an entire layer of etching protection layer can be deposited on the sub...
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Abstract
The invention discloses a superconducting thin film and a preparation method thereof. The method for preparing the superconducting thin film comprises the steps that a substrate is provided; an etch protection layer is formed on the substrate, and a mask pattern is formed on the etch protection layer; the etch protection layer is used as a mask; a superconducting thin film layer is deposited on one side, which is near the etch protection layer, of the substrate; the superconducting thin film layer comprises a patterned structure; and the patterned structure is consistent with the mask pattern.The invention provides the superconducting thin film and the preparation method thereof, so as to solve the problem that the quality factors of different superconducting waveguides prepared by the existing superconducting thin films differ greatly at different positions.
Description
technical field [0001] The invention relates to the technical field of superconducting quantum chips, in particular to a superconducting thin film and a preparation method thereof. Background technique [0002] With the widespread application of modern electronic computers, classical electronic computers have limitations in storage space and speed in large-scale data processing, especially in the field of quantum simulation. Coupled with the limitations of Moore's Law, scientists propose to use quantum effects for information processing and quantum computing. . In the early 1980s, scientists such as Richard Feynman proposed to use quantum principles to manufacture quantum computers and use them to simulate quantum mechanical systems. Subsequently, theoretical physicists and computer scientists have theoretically confirmed that quantum computers have far superior capabilities to classical computers in terms of quantum simulation, quantum global search, and key cracking. [...
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IPC IPC(8): H01L21/3205H01L21/322
CPCH01L21/3205H01L21/322Y02E40/60
Inventor 冯加贵熊康林丁孙安武彪孙骏逸黄永丹陆晓鸣芮芳
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI