Force/torque sensor temperature compensation
A technology of torque sensor and temperature compensation, which is applied in the direction of instruments, force measurement, torque measurement, etc.
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[0022] For purposes of brevity and illustration, the invention has been described primarily by reference to exemplary embodiments thereof. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one of ordinary skill in the art that the present invention may be practiced without limitation to these specific details. In this description, well-known methods and structures have not been described in detail in order not to unnecessarily obscure the invention.
[0023] Thermal Error Sources .
[0024] It is known in the art that temperature drift is a major source of inaccuracy in robotic force / torque sensors. The inventors have identified four main sources of temperature error.
[0025] First, the use of silicon strain gauges introduces thermal errors. Silicon strain gauges are preferred over metal foil strain gauges due to their high sensitivity. However, i...
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