Material box induction automatic control method of strip plasma cleaning machine

A plasma cleaning machine and plasma cleaning technology, which is applied in the field of ion cleaning machines, can solve problems such as product quality risks, operator errors, wrong program adjustments, etc., and achieve the effect of reducing product quality risks and improving work efficiency

Active Publication Date: 2022-01-11
上海泰睿思微电子有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, the general plasma cleaning machine includes four sets of production lines, and each production line is equipped with a feeding box. Therefore, the operator needs to manually input four sets of corresponding process parameters, so there are cumbersome steps in the operation of calling the program and the use of wrong programs. There is no risk of error, and there are no foolproof measures, which makes it easy for operators to use wrong programs to produce, resulting in product quality risks and other issues

Method used

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  • Material box induction automatic control method of strip plasma cleaning machine
  • Material box induction automatic control method of strip plasma cleaning machine

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Embodiment Construction

[0050] Detailed specific embodiments of the present invention will be disclosed herein. It is to be understood, however, that the disclosed embodiments are merely typical examples of the invention, which may be embodied in many alternative forms. Therefore, specific structural and functional details disclosed herein are not limiting, but merely serve as representative principles for illustrating various embodiments to one skilled in the art.

[0051] In order to facilitate the understanding of the present invention, the following will be described in conjunction with the accompanying drawings and embodiments.

[0052]The plasma cleaning machine of the present invention can generate physical and chemical plasma at the same time; the standard model of the cleaning machine uses two types of plasma for cleaning, and can also use a single type for cleaning according to actual needs.

[0053] In an embodiment of the present invention, the physical plasma cleans and etches the subst...

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Abstract

The invention provides a method for automatically controlling the material box induction of a strip plasma cleaning machine. The sensor at the feeding end of the cleaning machine senses the information on the number of pieces in the material loading box and outputs it to the processor of the cleaning machine, so that the The processor automatically retrieves corresponding preset process parameters according to the information on the number of webs sensed by the sensor at the feeding end to calculate and obtain corresponding plasma cleaning energy and automatically controls the device to transport the webs to be cleaned. In this way, the operation steps of program calling are greatly simplified, and it has the fool-proof effect of preventing operators from calling wrong programs, reducing the chance of operators calling wrong programs to zero; at the same time, reducing product quality risks.

Description

technical field [0001] The invention relates to the technical field of plasma cleaning machines, in particular to a material box induction automatic control method of a strip plasma cleaning machine. Background technique [0002] Plasma cleaner (plasma cleaner) is a kind of equipment that produces active ingredients that can act on the surface of materials through the dissociation of gas molecules, so as to achieve the cleaning effect that cannot be achieved by conventional cleaning methods. These active components are gas plasma (Plasma) aggregates composed of ions, electrons, atoms, active groups, excited nuclides (metastable states), photons and other components. These components are in a high-energy state, and they have Strong chemical reactivity, and it is easy to affect the surface properties of materials and produce changes. Therefore, the plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B7/00B08B13/00
CPCB08B7/00B08B13/00
Inventor 卢红平
Owner 上海泰睿思微电子有限公司
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