Material box induction automatic control device and method of strip-shaped plasma cleaning machine

A technology of plasma cleaning machine and automatic control device, applied in the field of plasma cleaning machine, can solve problems such as operator error, product quality risk, lack of foolproof measures, etc., to simplify program calling operation steps, reduce product quality risks, and avoid mistakes Programmatically produced effects

Active Publication Date: 2020-04-10
上海泰睿思微电子有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, the general plasma cleaning machine includes four sets of production lines, and each production line is equipped with a feeding box. Therefore, the operator needs to manually input four sets of corresponding process parameters, so there are cumbersome steps in the operation of calling the program and the use of wrong programs. There is no risk of error, and there are no foolproof measures, which makes it easy for operators to use wrong programs to produce, resulting in product quality risks and other issues

Method used

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  • Material box induction automatic control device and method of strip-shaped plasma cleaning machine
  • Material box induction automatic control device and method of strip-shaped plasma cleaning machine

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Embodiment Construction

[0050] Detailed specific embodiments of the present invention will be disclosed herein. It is to be understood, however, that the disclosed embodiments are merely typical examples of the invention, which may be embodied in many alternative forms. Therefore, specific structural and functional details disclosed herein are not limiting, but merely serve as a representative basis for describing various implementations to one skilled in the art in accordance with the claims.

[0051] In order to facilitate the understanding of the present invention, the following will be described in conjunction with the accompanying drawings and embodiments.

[0052]The plasma cleaning machine of the present invention can generate physical and chemical plasma at the same time; the standard model of the cleaning machine uses two types of plasma for cleaning, and can also use a single type for cleaning according to actual needs.

[0053] In an embodiment of the present invention, the physical plasm...

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Abstract

The invention provides a material box induction automatic control device and method of a strip-shaped plasma cleaning machine. Material piece quantity information in a feeding box is sensed by a feeding end inductor of a cleaning machine to be output to a processor of the cleaning machine, so that the processor automatically calls corresponding preset process parameters according to the material piece quantity information sensed by the feeding end inductor to obtain corresponding plasma cleaning energy through calculation, and the device is automatically controlled to convey and clean materialpieces. Therefore, the operation steps of program calling are greatly simplified, the fool-proof effect of avoiding wrong calling of the program by an operator is achieved, and the chance of callingthe wrong program by the operator is reduced to zero; meanwhile, the product quality risk is reduced.

Description

technical field [0001] The invention relates to the technical field of plasma cleaning machines, in particular to a material box induction automatic control device and a control method of a strip plasma cleaning machine. Background technique [0002] Plasma cleaner (plasma cleaner) is a kind of equipment that produces active ingredients that can act on the surface of materials through the dissociation of gas molecules, so as to achieve the cleaning effect that cannot be achieved by conventional cleaning methods. These active components are gas plasma (Plasma) aggregates composed of ions, electrons, atoms, active groups, excited nuclides (metastable states), photons and other components. These components are in a high-energy state, and they have Strong chemical reactivity, and it is easy to affect the surface properties of materials and produce changes. Therefore, the plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to ac...

Claims

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Application Information

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IPC IPC(8): B08B7/00B08B13/00
CPCB08B7/00B08B13/00
Inventor 卢红平
Owner 上海泰睿思微电子有限公司
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