Cell multi-parameter detection micro-nano sensor and manufacturing method thereof
A multi-parameter, sensor technology, applied in the direction of chemical instruments and methods, instruments, measuring devices, etc., can solve the problems of integration without detection steps, single, complex structure, etc.
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[0037] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0038] Cell multi-parameter detection micro-nano sensor of the present invention, such as figure 1 As shown, it includes a glass substrate 1 and a PDMS sheet 2 bonded to each other. Such as figure 2 As shown, the bonding surface of the PDMS sheet 2 is a slotted structure surface, and the bonding surface of the PDMS sheet 2 is provided with a flow channel 7, which is formed on the glass substrate 1 after bonding with the glass substrate 1 for the cell solution to flow through. The two ends of the flow channel 7 are respectively provided with through holes pierced through the PDMS sheet 2 to form the injection hole 5 and the sample outlet hole 6. Such as image 3 As shown, the flow cell 7 is provided with an open dam for the cell solution to flow into and retain, and the opening of the open dam faces the sample injection direction. Such as ...
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