10-14 micron central wavelength adjustable multi-layer symmetrical two-dimensional transmission grating and its preparation method

Abstract

The invention discloses a multi-layer symmetrical two-dimensional transmission grating with an adjustable central wavelength of 10-14 microns and a preparation method thereof, which solves the error caused by the complex film system of the FP cavity filter in the long-wave infrared band. The invention comprises: a grating layer, a base layer and a symmetrical high-reflective layer; the symmetrical high-reflective layer has eight layers from top to bottom, and the base layer is the bottom layer of the symmetrical high-reflective layer; the symmetrical high-reflective layer is passed through a metal materials and dielectric materials are arranged alternately; the metal material is germanium with a high refractive index, and the dielectric material is yttrium fluoride with a low refractive index; the grating layer uses germanium with a high refractive index, and in the symmetrical high reflection layer, the The refractive index material germanium and the low refractive index material yttrium fluoride are arranged alternately and the thickness of the high reflection layer is a quarter wavelength; the material of the base layer is germanium; the grating layer is located in the high reflection layer from top to bottom Arranged between the fourth and fifth floors.

Description

technical field [0001] The invention belongs to the technical field of micro-nano device design, and relates to a multi-layer symmetrical two-dimensional transmission grating structure with an adjustable central wavelength of 10-14 microns. Background technique [0002] Filter-based hyperspectral imaging technology can acquire high-resolution images quickly and in real time, so it has been widely used in real-time detection and classification. At present, the main technology of spectral imaging is pixel chip coating, and it is mostly used in visible light, near-infrared and mid-infrared bands. However, most of the long-wave infrared bands pass through the central wavelength of a specific band by changing the cavity depth of the FP cavity or filling the medium. Usually, the film system is complex and the number of layers is large, and the increase in the thickness of the film layer during the preparation process will lead to stress deformation, which brings difficulties to t...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a multi-layer symmetrical two-dimensional transmission grating whose duty cycle can be freely adjusted between 0-1 at 10-14 micron, which solves the problems caused by the film system of the FP cavity filter in the long-wave infrared band. Complexity brings errors to processing

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