A narrow-period long-wave infrared multilayer grating structure

Abstract

The invention discloses a narrow-period long-wave infrared multilayer grating structure and a preparation process thereof, which solves the problem that the existing large-period grating cannot meet the precondition of an infinitely large grating area when forming a grating array. A narrow-period long-wave infrared multilayer grating structure of the present invention comprises a grating layer, a base layer and a high-reflection layer from top to bottom; The high reflective layer low refractive index layer on the upper and lower surfaces of the high reflective layer high refractive index layer; the thickness of the grating layer is the same as that of the base layer, and the thickness of the two high reflective layer low refractive index layers is the same; the grating layer is included in the same plane distributed high-refractive-index material and low-refractive-index material; the high-refractive-index material is tellurium, and the low-refractive-index material is germanium; the base layer is made of metal material germanium; The material of the low refractive index layer of the anti-layer is sodium chloride.

Description

technical field [0001] The invention belongs to the technical field of micro-nano device design, and relates to a narrow-period long-wave infrared multilayer bandpass grating structure whose grating period can be adjusted freely within 0.1 μm-1 μm. Background technique [0002] A grating is a basic unit of a multispectral filter array. The multispectral filter array composed of gratings is compact, small in size, light in weight, and does not require additional driving equipment. It is an important research direction in the field of multispectral imaging. Designing a grating structure with good bandpass characteristics and low sideband effects is the premise and basis for the design of multispectral filter arrays. [0003] Guided mode resonant subwavelength filter devices have attracted extensive attention in recent years because of their advantages such as extremely narrow bandwidth, high diffraction efficiency and low sideband effects. For sub-wavelength waveguide gratin...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a narrow-period long-wave infrared multi-layer grating structure in view of the above-mentioned deficiencies in the prior art, which solves the problem that the existing large-period grating cannot satisfy the precondition of an infinitely large grating area when forming a grating array The problem

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