Multilayer symmetrical two-dimensional transmission grating with adjustable central wavelength of 10-14 microns and preparation method thereof
A center wavelength, transmission grating technology, applied in the direction of diffraction grating, optics, filter, etc., can solve the problem of FP cavity filter error and so on
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[0030] As shown in the figure, a multi-layer symmetrical two-dimensional transmission grating with an adjustable center wavelength of 10-14 microns includes: a grating layer 4, a base layer 5 and a symmetrical high-reflective layer 3; the symmetrical high-reflective layer is 8 in total from top to bottom layer, the base layer is the bottom layer of the high reflection layer;
[0031] The symmetrical high-reflection layer is alternately arranged by metal materials and dielectric materials; the metal material is high-refractive index material germanium, and the dielectric material is low-refractive index material yttrium fluoride; the grating layer is made of high-refractive index material germanium , in the symmetrical high reflection layer, the refractive index material germanium and the low refractive index material yttrium fluoride are arranged alternately and the thickness of the high reflection layer is a quarter wavelength;
[0032] The material of the base layer is germa...
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