69 results about "YTTRIUM FLUORIDE" patented technology

The invention discloses pressureless sintered aluminum nitride ceramic as well as a preparation method and application thereof. The preparation method comprises the following steps: ball-milling and mixing micron-sized aluminum nitride, a sintering aid, nano-sized molybdenum powder, a dispersing agent, a binder and an organic solvent to prepare slurry; and drying the slurry, granulating, forming, dumping and sintering to obtain the pressureless sintered aluminum nitride ceramic. Wherein the sintering aid is a combination of samarium fluoride and yttrium fluoride. According to the preparation method, oxygen is removed at a low temperature by virtue of strong affinity of the nanoscale molybdenum powder and oxygen, the nanoscale molybdenum powder and the sintering aid jointly play a role in liquid-phase sintering assistance at a high temperature, densified sintering is realized and grain growth is inhibited by adopting pressureless sintering at a relatively low sintering temperature, the aluminum nitride ceramic with both heat conduction and strength is obtained, and meanwhile, a low-resistance second phase is generated; the resistivity of the aluminum nitride ceramic is adjusted while the heat conduction characteristic of the aluminum nitride ceramic is improved, the electrical conductivity of the aluminum nitride material is improved, and finally the aluminum nitride ceramic with high heat conduction and bending strength and moderate resistivity is obtained to meet the use requirements of electrostatic chucks.

The invention relates to the technical field of surface engineering, discloses a method and a system for preparing a yttrium fluoride composite ceramic coating through atmospheric plasma spraying, and aims to solve the problems that the yttrium fluoride coating generates a brittle aluminum fluoride layer on the surface of an aluminum substrate due to fluorine ion diffusion, so that the bonding strength is low, and the yttrium fluoride coating is easy to peel off and lose efficacy. The method comprises the following steps: sequentially carrying out mechanical polishing, ultrasonic cleaning and sand blasting roughening on an aluminum base material; preparing composite powder formed by mixing yttrium fluoride, yttrium oxide and nanometer aluminum oxide according to the mass ratio of 75: 20: 5; sequentially depositing a yttrium oxide transition layer, a composite barrier layer and a yttrium fluoride functional layer by adopting atmospheric plasma spraying; and finally carrying out vacuum post-heat treatment. According to the system, through the synergistic effect of the three layers of gradient structures, the transition layer forms an yttrium aluminate metallurgical bonding interface, the barrier layer inhibits fluorine ion diffusion through the dual mechanisms of nanometer aluminum oxide physical barrier and yttrium oxide chemical adsorption, and the functional layer guarantees the plasma erosion resistance. According to the method, the bonding strength of the coating is remarkably improved to 50 MPa or above, the porosity is lower than 3%, stripping is avoided under 500-hour high-energy plasma bombardment, the process cost is reduced by 40%, and the method is suitable for cavity protection of semiconductor etching equipment.

Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and / or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable / uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

To provide a producing method of a ceramics member provided with an oxide ceramics sintering portion suppressed in generation of cracks accompanying sintering and having precise composition.SOLUTION: A method for producing a ceramic member 20 includes a step of irradiating at least a part of a precursor molded body 12 containing particles of oxide ceramics for sintering and a sintering aid containing a metal fluoride with a laser to sinter the oxide ceramics for sintering of the laser irradiation portion. The wavelength of the laser is preferably 350 to 2500 nm, and the output is preferably 1 to 1000 W / cm2. When a precursor molded body containing alumina as the oxide ceramics for sintering and yttrium fluoride as the metal fluoride is used, a ceramic member is obtained that includes a main phase made of alumina crystals and a grain boundary phase formed between the alumina crystals, and the ceramics member provided with an alumina sintering portion with the grain boundary phase including Y3Al5O12 is obtained.SELECTED DRAWING: Figure 1

The invention discloses a near-infrared light mediated heterogeneous composite photocatalyst as well as a preparation method and application thereof, the heterogeneous composite photocatalyst is an up-conversion luminescent material loaded semiconductor material, and can realize up-conversion luminescent catalysis under the irradiation of 980nm near-infrared light; the up-conversion luminescent material is rare earth ion doped fluoride nanoparticles, fluoride is one or two of yttrium fluoride and sodium yttrium tetrafluoride, the doped rare earth ions comprise rare earth luminescent center ions and light absorption ions, the luminescent center ions comprise one of Er < 3 + >, Tm < 3 + >, Tb < 3 + > and Pr < 3 + >, and the light absorption ions comprise Yb < 3 + >; the semiconductor material is of a heterojunction structure which is tightly formed by Co3O4 quantum dots and g-C3N4 nanosheets. The up-conversion nanoparticles are synthesized by adopting a simple hydrothermal method and are loaded on the g-CN nanosheets modified by the CoO quantum dots, and the obtained composite material can effectively convert near-infrared light into visible green light, so that generation of photocatalytic reaction species is increased, and the up-conversion nanoparticles are recycled and reused for multiple times without inactivation.

This disclosure provides a negative electrode active material which is for a fluoride ion secondary battery, which contains yttrium fluoride, and for which the crystallite size is 7-27 nm. A fluoride ion secondary battery 10 of this disclosure comprises: a positive electrode 2; a negative electrode 4; and an electrolyte layer 3 disposed between the positive electrode 2 and the negative electrode 4. The negative electrode 4 includes the negative electrode active material of this disclosure.

The invention provides a preparation method of an yttrium fluoride film, which comprises the following steps: S1) placing a substrate in an atomic layer deposition device, introducing a precursor containing yttrium and fluorine at the same time, and forming a film layer on the surface of the substrate after reaction; the film layer is subjected to purging; and S2) introducing an oxygen source into the atomic layer deposition device to react with the film layer, and purging again to obtain the yttrium fluoride film. According to different reactant precursors, the invention further provides a preparation method of the yttrium fluoride film. The invention further provides application of the yttrium fluoride thin film. According to the preparation method of the yttrium fluoride thin film, an atomic layer deposition method is utilized to alternately introduce a metal organic source and an oxygen source into a reaction chamber, and a film is formed through a self-limiting reaction. The prepared yttrium fluoride film is uniform and compact, no toxic gas is introduced, and the yttrium fluoride film has high safety.

The invention belongs to the field of electronic packaging materials, and particularly relates to a high-thermal-conductivity ceramic material for LED packaging and a manufacturing process of the high-thermal-conductivity ceramic material for LED packaging. The high-thermal-conductivity ceramic material is prepared from silicon nitride, aluminum nitride, magnesium fluoride, yttrium fluoride, lithium carbonate and two newly-designed modified compounds. The phase change regulator is composed of a boron-doped rare earth silicate nanocrystalline phase change regulator and a bimetallic chalcogenide compound interface modifier according to a specific weight part ratio. The preparation process mainly comprises the following steps: ball-milling and mixing the components, drying, granulating, and carrying out segmented hot pressed sintering in a protective atmosphere to finally obtain the compact ceramic material. The high-power LED packaging structure is particularly suitable for packaging of high-power LEDs, and the technical problem that heat dissipation and mechanical performance are difficult to consider at the same time is effectively solved.

The present technology is generally directed to semiconductor processing systems and methods. Systems and methods include a chamber having a plurality of chamber components, such as a pedestal, a lid stack, a faceplate, electrode, and a showerhead. The faceplate is supported with the lid stack and defines a plurality of first apertures and the showerhead is positioned between the faceplate and the pedestal and defines a plurality of second apertures. In systems and methods, the faceplate, the showerhead, the lid stack, the pedestal, or a combination thereof include an yttrium fluoride, yttrium oxyfluoride, or both yttrium fluoride and yttrium oxyfluoride coating having a thickness of greater than 10 μm on at least a portion of the respective chamber component or combination thereof.

The invention belongs to the field of optical materials, and discloses a composite yttrium fluoride coating material and a preparation method thereof.The composite yttrium fluoride coating material comprises yttrium fluoride, calcium fluoride and lead fluoride, the yttrium fluoride, the calcium fluoride and the lead fluoride form a ternary composite structure, and the yttrium element, the calcium element and the lead element are evenly distributed; the mass ratio of yttrium fluoride to calcium fluoride to lead fluoride in the composite yttrium fluoride coating material is (80-98): (15-1): (5-1). The calcium fluoride and the lead fluoride are introduced into the yttrium fluoride coating material, so that the thermal stability and the mechanical property of the coating material can be remarkably improved, and the problem that the yttrium fluoride coating material is splashed due to the fact that the outgassing amount is too large in the preheating stage is solved; meanwhile, the ternary composite structure is favorable for improving the uniformity and compactness of the film layer, so that the coating film is more flat and smoother, defects and pores in the film layer are reduced, the quality and performance of the coating film are improved, and the conditions of cracking and scattering of the film layer are reduced.

A nickel-hydrogen secondary battery (2) comprises an outer can (10) and an electrode group (22) housed in the outer can (10) together with an alkaline electrolyte. The electrode group (22) is formed by overlapping a positive electrode (24) containing a positive electrode mixture and a negative electrode (26) containing a negative electrode mixture via a separator (28). The positive electrode mixture comprises nickel hydroxide solid-dissolved with zinc as a positive electrode active material and zinc oxide as a positive electrode additive. The negative electrode mixture comprises hydrogen storage alloy particles and a negative electrode additive. The negative electrode additive is a composite of yttrium fluoride loaded on carbon black, and the composite covers a portion of the surface of the hydrogen storage alloy particles.

The application provides a composite ceramic coating spraying processing device, which can form an alumina coating and a silicon oxide coating through first spraying, can form an aluminum fluoride coating through second spraying, and can form a yttrium fluoride coating through third spraying; the three layers of coatings are sequentially distributed from inside to outside, forming a plasma-resistant ceramic coating with a multilayer composite structure, which enriches the structure of the composite ceramic coating and improves the overall protection capability against plasma etching, so that safety accidents can be avoided. The application solves the problems of single structure and poor protection capability of the traditional composite ceramic coating.

The application belongs to the field of new materials, and discloses an alumina ceramic with low thermal expansion coefficient, which is formed by sintering raw materials, the raw materials comprising: alumina: 98.5-99.1 wt%; silicon powder: 0.15-0.25 wt%; magnesium oxide: 0.15-0.25 wt%; yttrium fluoride: 0.15-0.25 wt%; and fused crystal beta-cristobalite: 0.25-0.75 wt%. The product is composed of four-element ceramic formula of Al, Si, Mg and Y, which meets the demand of the market for 99 alumina ceramic products with low thermal expansion coefficient, and greatly improves the application value of 99 alumina ceramic in ceramic substrates and electrostatic chucks. Meanwhile, the application also discloses a preparation method of the alumina ceramic.

An embodiment of a method includes placing a substrate on a substrate support assembly that is at least partially positioned in a processing chamber. The substrate support assembly includes a body having an outer surface and an outer coating layer disposed at least partially over the outer surface, the outer coating layer comprising yttrium fluoride (YF3). In addition, the method includes contacting a surface of the substrate with a process gas in the processing chamber at a process temperature that is about 40° C. or less to remove oxides from the surface.

To provide a method for efficiently sintering sinter ceramics and a sintering aid used in the method.SOLUTION: The present invention includes a step of irradiating a mixture containing ceramic particles for sintering and a sintering aid containing a metal fluoride with a laser. The wavelength of the laser is preferably 350 to 2500 nm, and the output is preferably 1 to 1000 W / cm2. As the metal fluoride, yttrium fluoride, barium fluoride, etc. are preferably used.SELECTED DRAWING: Figure 1

The invention relates to the technical field of rare earth metal electrolysis cathode protection coatings, in particular to an in-situ generated rare earth oxide diffusion barrier layer on the surface of a tungsten cathode. According to the method, fused salt electrodeposition and sol chemical deposition are combined, and a composite diffusion barrier layer of an yttrium tungstate binding layer / yttrium oxyfluoride barrier layer is constructed on the surface of a tungsten cathode in situ; the method comprises the following steps: firstly, enabling sodium tungstate to react with yttrium fluoride in fused salt through electro-deposition, and generating a compact and firmly combined yttrium tungstate layer on a tungsten substrate in situ; and then a compact surface layer of multiple yttrium oxyfluoride layers is constructed on the surface of the tungsten cathode by adopting a sol-gel method, strong interface bonding is realized by utilizing an in-situ reaction, surface hole sealing is realized by utilizing the densification characteristic of yttrium oxyfluoride, finally, a composite protection structure is formed, and the high-temperature oxidation resistance and molten salt corrosion resistance of the tungsten cathode are remarkably improved.

This invention belongs to the field of ceramic material preparation technology and discloses a method for preparing high-strength ceramics. The method uses micron-sized silicon carbide and nano-sized alumina as the base ceramic phases, adding nickel-coated alumina microspheres as a biomimetic toughening phase, combined with samarium fluoride-yttrium fluoride composite additives, nano-molybdenum powder and other sintering aids, as well as a specific molding and dispersion system and defect control agents. High-strength ceramics are obtained through biomimetic composite slurry preparation, DLP photopolymerization molding, gradient debinding, and segmented pressureless sintering. This method can prepare products with complex shapes, and the resulting ceramics have high density, high flexural strength, high fracture toughness, and excellent corrosion resistance and thermal shock resistance. They are suitable for wear-resistant parts and seals in electromechanical and petrochemical equipment, and their comprehensive performance meets the requirements of harsh working conditions.

The invention discloses fluoride nanocrystalline glass ceramic containing a Pb4Y3F17 crystal phase. The fluoride nanocrystalline glass ceramic is prepared from the following raw material components in percentage by mole: 30 to 35 mol percent of AlF3, 10 to 15 mol percent of BaF2, 10 to 25 mol percent of YF3, 25 to 30 mol percent of PbF2, 8 to 12 mol percent of MgF2 and 1 to 15 mol percent of HoF3, the fluoride nanocrystalline glass ceramic containing the Pb4Y3F17 crystal phase is prepared by the following steps: obtaining a fluoroaluminate glass precursor by adopting a melting quenching method, and then preparing the fluoride nanocrystalline glass ceramic by utilizing a heat treatment method. The invention also discloses a preparation method of the fluoride nanocrystalline glass ceramic containing the Pb4Y3F17 crystal phase. According to the invention, the Pb4Y3F17 crystal with a single crystal phase is separated out from fluoroaluminate glass, so that a crystal field environment which is more stable for the luminescence characteristic of rare earth elements is obtained.

A core-shell nanoparticle having a cleaned nitrogen-vacancy nanodiamond (NVND) core surrounded by an upconversion nanoparticle (UCNP) shell, wherein the cleaned nitrogen-vacancy nanodiamond (NVND) core comprises a cleaned nitrogen-vacancy nanodiamond, wherein the UCNP shell comprises an upconversion nanoparticle (UCNP), wherein the UCNP comprises lithium yttrium fluoride (LiYF4) doped with a lanthanide ion combination, wherein the lanthanide ion combination comprises a M1 ion and a M2 ion, wherein M1 is ytterbium (Yb) or neodymium (Nd) and M2 is erbium (Er), thulium (Tm) or holmium (Ho), and wherein the core-shell nanoparticle emits a red-emission upon a near-infrared (NIR) excitation is disclosed. Integration of cleaned NVNDs with UNCPs for enhancing optical manipulation and enabling efficient energy transfer for applications in biological imaging, quantum sensing and laser cooling is disclosed.

The invention discloses a compound optical amplitude limiting structure based on stimulated Brillouin effect and a design method thereof, and relates to the technical field of laser amplitude limiting, the compound optical amplitude limiting structure comprises packaging protection layers which are sequentially arranged along the optical path direction, the packaging protection layers are made of neodymium-doped lithium yttrium fluoride glass, the packaging protection layers are in a rectangular flat plate shape, and the packaging protection layers are made of neodymium-doped lithium yttrium fluoride glass. Extending narrow edges are arranged on the two sides in the light path direction, so that a combined structure with a containing space is formed; the first optical amplitude limiting dielectric layer is made of CS2 liquid, and one side of the isolation layer is in contact with the surface of the first optical amplitude limiting dielectric layer; the second optical amplitude limiting dielectric layer is made of TeO2 crystals, and the compound optical amplitude limiting structure based on the stimulated Brillouin effect and the design method of the compound optical amplitude limiting structure solve the problem that in the prior art, a laser amplitude limiting material is difficult to give consideration to both high and low light transmittance and high light consumption rate at the same time. The compound optical amplitude limiting structure based on the stimulated Brillouin effect and the design method of the compound optical amplitude limiting structure based on the stimulated Brillouin effect solve the problem.

The invention discloses a doped yttrium lithium fluoride crystal and a preparation method thereof, and belongs to the technical field of crystal preparation, and the preparation method comprises the following steps: S1, weighing L F, YF3, ErF3, YbF3 and modified polytetrafluoroethylene, mixing, and carrying out ball milling to obtain raw material powder; s2, the raw material powder is placed in a tubular resistance furnace, air is exhausted through high-purity nitrogen, the temperature is 750-815 DEG C, HF gas is introduced, a reaction is conducted for 1-5 h, and crystal powder is obtained; s3, the crystal powder is placed in a grinder to be ground into powder, then the powder is placed in a platinum crucible to be compacted, the crucible is sealed, the sealed platinum crucible is placed in a crucible descent crystal growth furnace, the crystal is grown through a crucible descent method, and the doped yttrium lithium fluoride crystal is obtained.The obtained doped yttrium lithium fluoride crystal is higher in 2.7-micron fluorescence intensity, suitable for laser devices and capable of being used for laser devices. And high-efficiency mid-infrared light laser of 2.7 microns is output.

The invention discloses a silicon nitride-based ceramic sheet with a dense surface and a preparation method thereof, and relates to the technical field of ceramic preparation; the ceramic sheet prepared by the invention is coated with an inhibitory coating, thereby uniformly controlling the volatilization of the glass phase on the surface of the ceramic sheet, avoiding the formation of holes, and improving the density and withstand voltage value of the ceramic sheet. The coating slurry is obtained by mixing and grinding intercalated mixed powder, inhibitory mixed powder, solvent and organic carrier, wherein the inhibitory mixed powder is at least one of magnesium fluoride, magnesium nitride, yttrium fluoride, yttrium nitride and silicon dioxide, adding anhydrous ethanol and Span 85, mixing, calcining and grinding.

The invention belongs to the field of aluminum alloy surface treatment, and particularly relates to an electrochemical fluorination self-hole-sealing method for an aluminum alloy. The method comprises the following steps: (1) preparing a first coating on the surface of the aluminum alloy through an electrochemical method; (2) preparing a second coating through an electrochemical method; wherein the first coating is aluminum fluoride, and the second coating is a mixed coating of aluminum fluoride and yttrium fluoride.

The invention belongs to the technical field of new energy materials and devices, and relates to a high capacity retention rate lithium-rich manganese-based positive electrode material synthesis method, which comprises: co-precipitating to synthesize a nickel cobalt manganese carbonate precursor; the preparation method comprises the following steps: dispersing a nickel-cobalt-manganese carbonate precursor in an organic solvent to form a precursor suspension, dispersing a single-source dopant in the organic solvent to form a dopant suspension, and carrying out liquid-phase mixing on the precursor suspension and the dopant suspension to prepare an intermediate; and fully grinding and mixing the intermediate and a lithium source, and calcining at high temperature to obtain the lithium-rich manganese-based positive electrode material. Specific metal fluoride is selected as a unique dopant source, and an innovative liquid phase mixing process is combined, so that the dopant is uniformly dispersed, the crystal structure is optimized, and the cycling stability of the material is remarkably improved. Experiments show that under the doping proportion of 0.4 mol% of yttrium fluoride, the capacity retention ratio of the material after circulation for 100 times reaches up to 97.59%, which is far better than that of an undoped material (79.94%), and the problem of fast capacity fading of a lithium-rich manganese-based positive electrode is solved.

The invention discloses a rare earth sodium yttrium fluoride-based flexible composite material with self-recovery force luminescence and a preparation method thereof. The flexible composite material comprises two parts, namely an optical function material and an elastic carrier material, wherein the optical function material is sodium yttrium fluoride-based fluorescent powder (NaY (1-x) F4: xRE3 + (RE = Tb / Er / Tm / Sm) and is synthesized through a high-temperature solid-phase method, the carrier material is polydimethylsiloxane (PDMS) or polyurethane, and a natural rubber elastomer material, the optical function material and the elastic carrier material are prepared and fully mixed to prepare a precursor, the precursor is put into a heat preservation box to be subjected to heat preservation for more than 2 hours at a specific temperature, and the optical function material is obtained. The flexible composite material of the rare earth sodium yttrium fluoride-based dynamic luminescent fluorescent powder is obtained. According to the rare earth sodium yttrium fluoride-based flexible composite material with self-recovery mechanoluminescence and the preparation method thereof, the needed raw materials are simple, the process is convenient, large equipment is not needed, mass production is convenient, performance is stable, pollution is avoided, energy charging is not needed, self-recovery and luminescence efficiency is high, elasticity is good, and flexibility is good.

The present invention relates to the field of coating, and specifically to a surface coating process for an optical component product, comprising the following steps: step 1, cleaning and drying a zinc selenide substrate to obtain a pre-treated zinc selenide substrate; step 2, preparing a coating material, the coating material comprising iridium indium selenide, zinc selenide, and yttrium fluoride, grinding and screening; step 3, placing the pre-treated zinc selenide substrate in a coating device, then adding the coating material, and coating layer by layer to obtain a coated optical component product. The process of the present invention is not only simple to operate, but also has a high quality of the obtained coating, and the coating has the advantages of being uniform and dense, having good adhesion, and being resistant to moisture and heat.

A negative electrode for an alkaline storage battery that achieves both an improvement in cycle life and an improvement in low temperature discharge characteristics, and an alkaline storage battery including the negative electrode are disclosed. The negative electrode for an alkaline storage battery includes a negative electrode core body formed of metal, and a negative electrode mixture layer which contains at least a hydrogen storage alloy and yttrium fluoride, and is carried on the negative electrode core body. Particles of the yttrium fluoride are formed so that the average particle size thereof is equal to 1 μm or more and 7 μm or less.

The present technology generally relates to semiconductor processing systems and methods. Systems and methods include a chamber having a plurality of chamber components, such as a susceptor, a lid stack, a panel, an electrode, and a showerhead. The panel is supported by the cover stack and defines a plurality of first apertures, and the showerhead is located between the panel and the base and defines a plurality of second apertures. In systems and methods, the panel, showerhead, cover stack, susceptor, or a combination thereof includes a coating of yttrium fluoride, yttrium oxyfluoride, or yttrium fluoride and yttrium oxyfluoride having a thickness greater than 10 [mu] m over at least a portion of the individual chamber components, or a combination thereof.

A coating film (53) is formed on a substrate (52) of a member for a plasma processing device by using a suspension plasma thermal spray method. A suspension (63) used in suspension plasma thermal spraying contains a fluorine-containing solvent (61), a plurality of yttrium fluoride particles, and a plurality of yttrium oxyfluoride particles.